Patents by Inventor Rick O. Eller

Rick O. Eller has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Quick change sputter target assembly
    Patent number: 5147521
    Abstract: A sputtering target assembly is disclosed having a sputtering gun with an inner and outer annular wall, where the inner annular wall has a plurality of radially projecting set screws, threadably movable within threaded apertures in the inner annular wall. A mounting ring is profiled to fit over the inner annular wall, the mounting ring having a recessed grove, into which the set screws are received, to secure the mounting ring. The mounting ring includes a plurality of radially disposed spring plungers which are threadably installed in threaded apertures in the mounting ring. The target has a grooved inner annular surface for receiving the spring ball plungers, whereby the target is retained to the sputtering gun.
    Type: Grant
    Filed: May 20, 1991
    Date of Patent: September 15, 1992
    Assignee: Tosoh SMD, Inc.
    Inventors: Robert L. Belli, Martin L. Blazic, Rick O. Eller, Kenneth B. Fielder, Conrad E. Fuchs