Abstract: Disclosed is a pin lifting device which includes a housing extending along an adjustment axis, a housing end at a first end region of the housing and has a housing opening, a drive part arranged at a second end region of the housing, an adjusting device having a part which can move in the housing in the direction of the adjustment axis, a guide section for the adjusting device formed on the inside of the housing between a first stop at the frontal housing end and a second stop remote therefrom, a tight connecting device formed inside the housing between the frontal housing end and the adjusting device, and a connecting channel extending from the first stop to the second stop at the guide section. A contiguous second inner region leads to minimal changes in the volume of the second inner region even during movements of the movable part.

Abstract: A pin lifting device is disclosed and configured for moving and positioning a substrate to be processed in an atmosphere region provided by a vacuum process chamber. The pin lifting device includes a coupling part having a coupling adapted to receive a support pin adapted to contact and support the substrate, and a drive part having a drive unit adapted to cooperate with the coupling by means of an adjusting member such that the coupling is controllably adjustable from a lowered normal position to an extended support position and back. The pin lifting device also has an insulating component located between the drive part and the coupling part and providing complete galvanic isolation between the drive part and the coupling part.

Abstract: Disclosed is a pin lifting device which includes a housing extending along an adjustment axis, a housing end at a first end region of the housing and has a housing opening, a drive part arranged at a second end region of the housing, an adjusting device having a part which can move in the housing in the direction of the adjustment axis, a guide section for the adjusting device formed on the inside of the housing between a first stop at the frontal housing end and a second stop remote therefrom, a tight connecting device formed inside the housing between the frontal housing end and the adjusting device, and a connecting channel extending from the first stop to the second stop at the guide section. A contiguous second inner region leads to minimal changes in the volume of the second inner region even during movements of the movable part.

Abstract: A valve (1), in particular a vacuum valve, with at least one closure member (2) which has a wedge-shaped closure region (3), and with at least one valve seat (5) which surrounds a valve opening (4) of the valve (1), wherein, in a closed position of the closure member (2), the wedge-shaped closure region (3) bears sealingly against the valve seat (5) and closes the valve opening (4) and, in an open position, opens up the valve opening (4) so that fluids and/or solids can be transported through the valve opening (4), wherein the closure member (2) with the wedge-shaped closure region (3) is mounted so as to be movable back and forth between the closed position and the open position along a movement path (6), wherein the movement path (6) is angled-off and/or bent.

Abstract: A pin lifting device is disclosed and configured for moving and positioning a substrate to be processed in an atmosphere region provided by a vacuum process chamber. The pin lifting device includes a coupling part having a coupling adapted to receive a support pin adapted to contact and support the substrate, and a drive part having a drive unit adapted to cooperate with the coupling by means of an adjusting member such that the coupling is controllably adjustable from a lowered normal position to an extended support position and back. The pin lifting device also has an insulating component located between the drive part and the coupling part and providing complete galvanic isolation between the drive part and the coupling part.

Abstract: A valve (1), in particular a vacuum valve, with at least one closure member (2) which has a wedge-shaped closure region (3), and with at least one valve seat (5) which surrounds a valve opening (4) of the valve (1), wherein, in a closed position of the closure member (2), the wedge-shaped closure region (3) bears sealingly against the valve seat (5) and closes the valve opening (4) and, in an open position, opens up the valve opening (4) so that fluids and/or solids can be transported through the valve opening (4), wherein the closure member (2) with the wedge-shaped closure region (3) is mounted so as to be movable back and forth between the closed position and the open position along a movement path (6), wherein the movement path (6) is angled-off and/or bent.

Abstract: A valve (1), in particular a vacuum valve, comprising a valve plate (2) for closing an opening (3), in particular of the valve (1), and comprising at least two piston cylinder units (4, 5) for pressing the valve plate (2) against a valve seat (6), in particular of the valve (1), said valve seat surrounding the opening (3), at least one of the piston cylinder units (5) having at least one cylinder (7) as a component and at least one piston (8) arranged displaceably in the cylinder (7) as a further component, one of the components of the piston cylinder unit (5) being fixed on the valve plate (2), in particular in a manner stationary relative to the valve plate (2), wherein at least one of the components, preferably the other component, of this piston cylinder unit (5) is mounted on at least one support (10, 11) of the valve (1) so as to be movable, preferably displaceable, at least in a direction (9) parallel to the spacing between two adjacent piston cylinders units (4, 5).

Abstract: A valve (1), in particular a vacuum valve, comprising a valve plate (2) for closing an opening (3), in particular of the valve (1), and comprising at least two piston cylinder units (4, 5) for pressing the valve plate (2) against a valve seat (6), in particular of the valve (1), said valve seat surrounding the opening (3), at least one of the piston cylinder units (5) having at least one cylinder (7) as a component and at least one piston (8) arranged displaceably in the cylinder (7) as a further component, one of the components of the piston cylinder unit (5) being fixed on the valve plate (2), in particular in a manner stationary relative to the valve plate (2), wherein at least one of the components, preferably the other component, of this piston cylinder unit (5) is mounted on at least one support (10, 11) of the valve (1) so as to be movable, preferably displaceable, at least in a direction (9) parallel to the spacing between two adjacent piston cylinders units (4, 5).