Abstract: A resonant type transducer transmitting or receiving narrowband continuous waves into or from a propagation medium, comprising a piezoelectric or electro strictive vibrator having a specific acoustic impedance; a single matching layer or multiple matching layers contacting the piezoelectric or electro strictive vibrator as well as the propagation medium to maximise power transfer to and from the transducer and the propagation medium. The equivalent specific acoustic impedance of the matching layers and propagation medium is complex conjugate to the equivalent specific acoustic impedance of the piezoelectric or electro strictive vibrator and backing layer at the frequency of operation resulting in reflection of the travelling wave in the layers resulting in in-phase addition and maximum power transfer.

Abstract: A camera system incorporating a MEMS actuator to achieve focus adjustments to compensate for the thermal expansion of the lens assembly is disclosed. The camera comprises a lens barrel, lens holder, infra-red (IR) filter, board circuit, MEMS actuator, housing package for the actuator, and an image sensor. The image sensor is directly wire bonded to pads on the circuit board such that these pads are movable at the image sensor end and fixed at the circuit board end. When the camera is exposed to temperature variations, the MEMS actuator moves the sensor along the optical axis to maintain the image in focus.

Abstract: A camera system incorporating a MEMS actuator to achieve focus adjustments to compensate for the thermal expansion of the lens assembly is disclosed. The camera comprises a lens barrel, lens holder, infra-red (IR) filter, board circuit, MEMS actuator, housing package for the actuator, and an image sensor. The image sensor is directly wire bonded to pads on the circuit board such that these pads are movable at the image sensor end and fixed at the circuit board end. When the camera is exposed to temperature variations, the MEMS actuator moves the sensor along the optical axis to maintain the image in focus.

Abstract: The present invention is a mechanism to achieve autofocus (AF) and optical image stabilization (OIS) to counteract hand-shake by tilting the lens and the image sensor simultaneously such that no vignetting effect is introduced to the image. The present invention removes the blur or distortion (vignetting effect) by incorporating an actuator beneath the image sensor to tilt the image sensor in conjunction with the lens barrel tilt to achieve OIS. Such simultaneous and coordinated tilting to the optical elements in the camera (lens barrel and image sensor) guarantees that the plane of the reflected image and the plane of the image sensor are both parallel, and aberrations free images are constructed.

Abstract: A capacitive MEMS force sensor for touch recognition and force measurement in touch screens is provided. The sensor includes two planar conductive electrodes separated by a predetermined distance using an elastic spacer to define an initial capacitance value of the sensor. An applied external force deforms the elastic spacer and minimizes the gap between sensor electrodes to alter the nominal capacitance value. This change in capacitance is monitored to measure the magnitude of the touch force. The sensor includes two types of the elastic spacers with different values of stiffness to overcome the trade-off between sensitivity and dynamic range of force measurement. These elastic spacers are interposed between sensor electrodes and are offset with a height difference to provide two ranges of force measurement.

Abstract: A MEMS electrostatic piston-tube actuator that provides 4 degrees of freedom (4-DOF) motion is disclosed. The actuator comprises of an inner and an outer MEMS structure. The inner MEMS structure comprises of an inner moving stage (rotor) and an inner fixed frame (stator). The inner rotor comprises of a central load stage, a plurality of rotary comb drive electrodes surrounding the central rotor. The outer MEMS structure comprises of an outer moving stage (outer rotor) and outer stator frame. The outer rotor holds the entire inner MEMS structure and is rigidly attached to it through a fixed periphery of the inner MEMS structure. The outer rotor comprises of a plurality of through openings (tubes) and attached to a fixed outer periphery through a plurality of mechanical springs. A load set on the central stage can be controlled in 4-DOF comprising of translational and rotational motions of roll, yaw, pitch, and z-axis translation.

Abstract: A MEMS electrostatic actuator that provides 5 degrees of freedom (5-DOF) motion is disclosed. The actuator comprises of an inner, a middle, and an outer MEMS structures that are nested with respect to each other. Each of the structures comprise of a plurality of rotors and stators. The rotors further comprise a plurality of moving capacitive electrodes which engage with a plurality of fixed capacitive electrodes in the stators to provide a variety of translational and rotational motions.

Abstract: The present invention is a mechanism to achieve autofocus (AF) and optical image stabilization (OIS) to counteract hand-shake by tilting the lens and the image sensor simultaneously such that no vignetting effect is introduced to the image. The present invention removes the blur or distortion (vignetting effect) by incorporating an actuator beneath the image sensor to tilt the image sensor in conjunction with the lens barrel tilt to achieve OIS. Such simultaneous and coordinated tilting to the optical elements in the camera (lens barrel and image sensor) guarantees that the plane of the reflected image and the plane of the image sensor are both parallel, and aberrations free images are constructed.

Abstract: A novel high resolution, low noise MEMS capacitive accelerometer is disclosed. The accelerometer utilizes a piston-tube electrode configuration that enables the use of a wide area for the electrodes. Therefore, a high capacitive sensitivity is achieved. The accelerometer consists of two structures: upper and lower. The lower structure contains a plurality of fixed electrodes that are attached to the base and have a piston-style shape (teeth). Those pistons form the sensing electrodes of the accelerometer. The upper structure contains a plurality of moving electrodes that have a tube-style shape (through holes), and they are attached to a substrate via restoring mechanical springs. The proof mass of the accelerometer is distributed around these tubes to reduce squeeze thin film damping in the system. The accelerometer is able to sense linear acceleration along the z-axis and/or the angular acceleration about the in-plane axes (x and y).

Abstract: Miniature camera modules that achieve autofocus (AF) and optical image stabilization (OIS) using piston-tube electrostatic actuators are disclosed. Various embodiments of the camera modules that work on two main mechanisms are disclosed. The two mechanisms are the whole barrel motion leading to AF and OIS and the single lens motion leading to AF. The MEMS actuator is integrated within a housing which is, in turn, coupled with an image sensor module. Autofocus is achieved by a translational motion of the piston-tube electrostatic actuator to translate the whole barrel back and forth. OIS is achieved by tilting the whole barrel using the tilting action of the piston-tube actuator.

Abstract: A highly sensitive MEMS capacitive force sensor offering a wide force measurement range is disclosed. The force sensor utilizes a piston-tube electrode configuration that enables the use of a wide area of the electrodes. Therefore, a high sensitivity for force detection is achieved. The force sensor consists of a lower structure, an upper structure, and a force contact platform. The lower structure contains a plurality of fixed electrodes that are attached to the base and have a plurality of teeth (pistons). Those teeth form the fixed sensing electrodes of the force sensor. The upper structure comprises of a moving section that has a plurality of apertures. The moving section is attached to the substrate via restoring mechanical springs. A force contact platform is attached to the moving electrode and provides the foundation for the force to be applied. The force sensor is able to measure concentrated and distributed force (mechanical pressure).

Abstract: Miniature camera modules that achieve autofocus (AF) and optical image stabilization (OIS) using piston-tube electrostatic actuators are disclosed. Various embodiments of the camera modules that work on two main mechanisms are disclosed. The two mechanisms are the whole barrel motion leading to AF and OIS and the single lens motion leading to AF. The MEMS actuator is integrated within a housing which is, in turn, coupled with an image sensor module. Autofocus is achieved by a translational motion of the piston-tube electrostatic actuator to translate the whole barrel back and forth. OIS is achieved by tilting the whole barrel using the tilting action of the piston-tube actuator.

Abstract: A MEMS electrostatic piston-tube actuator is disclosed. The actuator comprises two structures. A structure that comprises a plurality of fixed piston-like electrodes that are attached to a base, and form the stator of the actuator. A second structure that comprises a plurality of moving tube-like electrodes that are attached to the body of the upper structure and form the rotor of the actuator. The rotor is attached to the stator through a mechanical spring. The rotor of the actuator provides a translational motion, about the normal axis to the structures. The present piston-tube actuator utilizes a configuration that enables the use of wide area electrodes, and therefore, provides a high output force enabling translation of the rotor.

Abstract: A miniature camera module that achieves autofocus (AF) by applying actuation to the image sensor using MEMS (Micro Electro Mechanical System) actuators comprising of a piston-tube electrostatic actuators. The camera comprises of a MEMS piston-tube actuator, an image sensor die, an IC package, a housing, and a lens barrel. The image sensor die is attached and is electrically bonded to the moving rotor of the MEMS electrostatic piston-tube actuator, which is, in turn, attached and electrically bonded to a semiconductor device package. The packaged piston-tube actuator with the image sensor attached to it is covered with a transparent protection lid which could be an IR filter.

Abstract: A miniature camera module that achieves autofocus (AF) by applying actuation to the image sensor using MEMS (Micro Electro Mechanical System) actuators comprising of a piston-tube electrostatic actuators. The camera comprises of a MEMS piston-tube actuator, an image sensor die, an IC package, a housing, and a lens barrel. The image sensor die is attached and is electrically bonded to the moving rotor of the MEMS electrostatic piston-tube actuator, which is, in turn, attached and electrically bonded to a semiconductor device package. The packaged piston-tube actuator with the image sensor attached to it is covered with a transparent protection lid which could be an IR filter.

Abstract: A touch-sensitive interface module that is able to provide 3-dimensional information about a touch by a user is disclosed. The touch-sensitive interface can detect the x-y position and the amount of the force applied on the interface. It comprises of a flexible display panel, an array of MEMS capacitive force sensors, each of which is electrically addressable and/or a circuit board of electrical connections. The force sensors comprise of a piston-tube electrode configuration that allows for easy to detect capacitive changes even when a small force is applied.

Abstract: A touch-sensitive interface module that is able to provide 3-dimensional information about a touch by a user is disclosed. The touch-sensitive interface can detect the x-y position and the amount of the force applied on the interface. It comprises of a flexible display panel, an array of MEMS capacitive force sensors, each of which is electrically addressable and/or a circuit board of electrical connections. The force sensors comprise of a piston-tube electrode configuration that allows for easy to detect capacitive changes even when a small force is applied.

Abstract: A highly sensitive MEMS capacitive force sensor offering a wide force measurement range is disclosed. The force sensor utilizes a piston-tube electrode configuration that enables the use of a wide area of the electrodes. Therefore, a high sensitivity for force detection is achieved. The force sensor consists of a lower structure, an upper structure, and a force contact platform. The lower structure contains a plurality of fixed electrodes that are attached to the base and have a plurality of teeth (pistons). Those teeth form the fixed sensing electrodes of the force sensor. The upper structure comprises of a moving section that has a plurality of apertures. The moving section is attached to the substrate via restoring mechanical springs. A force contact platform is attached to the moving electrode and provides the foundation for the force to be applied. The force sensor is able to measure concentrated and distributed force (mechanical pressure).

Abstract: A three-degrees-of-freedom MEMS electrostatic piston-tube actuator is disclosed. The actuator comprises two structures. A structure that comprises a plurality of fixed piston-like electrodes that are attached to a base, and form the stator of the actuator. A second structure that comprises a plurality of moving tube-like electrodes that are attached to the body of the upper structure and form the rotor of the actuator. The rotor is attached to the stator through a mechanical spring. The rotor of the actuator provides a 3-DOF motion, comprising vertical translation and bi-axial rotation about the axes of the structures. The present piston-tube actuator utilizes a configuration that enables the use of wide area electrodes, and therefore, provides a high output force enabling translation of the rotor or a high output torque enabling rotation of the rotor.

Abstract: A device for real time monitoring of fluid composition in microfluidic devices. The invention can be integrated into any microfluidic device where fluid moves along a pathway with a measurement region consisting of at least two measurement electrodes. The fluidic pathway can contain an unbound droplet, a droplet confined in at least one aspect, or a continuous flow. The device also includes control circuitry connected to measurement electrodes that allows for the determination of the droplet composition by measuring at least one of capacitance, resistance, or impedance between said electrodes. This invention can (1) measure droplet composition, (2) compare composition against a known sample, (3) monitor droplet mixing, (4) control mixing to achieve specific mixing ratios, (5) measure the particle concentration within a droplet, (6) determine the position of particles in a droplet, and (7) monitor chemical reactions. These functions call all be performed in real time.