Patents by Inventor Rieko Hachiya, legal representative

Rieko Hachiya, legal representative has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Inspection apparatus and inspection method
    Patent number: 8203705
    Abstract: The invention is directed to detect a warp amount in a real-time manner in a wafer rotating at high speed under inspection.
    Type: Grant
    Filed: January 8, 2009
    Date of Patent: June 19, 2012
    Assignee: Hitachi-High Technologies Corporation
    Inventors: Masami Ooyama, Masayuki Hachiya, Rieko Hachiya, legal representative, Kimiko Hachiya, legal representative, Kazuhiro Zama, Keiichi Nagasaki
  • Optical defect inspection apparatus
    Patent number: 8184283
    Abstract: A laser beam oscillated from a laser source is folded in its path by first and second plane mirrors and enters a beam expander. The surface of each plane mirror is deteriorated with illumination by the laser beam and the reflectance is reduced. To avoid a light quantity of the laser beam entering the beam expander from being reduced below a reference value, when the laser beam is illuminated over a certain time, a position on each of the first and second plane mirrors at which the laser beam is illuminated is changed by a structure for rotating and/or translating a reflecting surface of each plane mirror on a plane, which includes the plane mirror, while an optical axis is kept same. Thus, the useful life of each plane mirror can be prolonged without displacing the optical axis.
    Type: Grant
    Filed: May 21, 2010
    Date of Patent: May 22, 2012
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Yuuichiro Iijima, Masayuki Hachiya, Rieko Hachiya, legal representative, Koichi Asami, Yusuke Miyazaki, Kazuhiro Zama