Patents by Inventor Riikka ?ström

Riikka ?ström has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for the manufacturing of a capacitive pressure sensor, and a capacitive pressure sensor
    Patent number: 7252007
    Abstract: The invention relates to measuring devices for the measuring of pressure, and more specifically to capacitive pressure sensors. The silicon crystal planes {111} are located at the corners of a wet etched membrane well of a pressure sensor element according to the present invention. An object of the invention is to provide an improved method of manufacturing a capacitive pressure sensor, and a capacitive pressure sensor suitable for use, in particular, in small capacitive pressure sensor solutions.
    Type: Grant
    Filed: April 26, 2005
    Date of Patent: August 7, 2007
    Assignee: VTI Technologies Oy
    Inventors: Jaakko Ruohio, Riikka Åström