Patents by Inventor Rikki S. LaBere

Rikki S. LaBere has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer transfer apparatus
    Patent number: 5590996
    Abstract: A wafer transfer apparatus capable of simultaneously transferring multiple semiconductor wafers to and from a furnace or similar columnar wafer station. The apparatus has a cantilevered extension which extends from a main part. The extension is preferably mounted for pivotal movement. The extension has a distal engagement head mounted thereon. The distal engagement head is moved between a lateral position and an upstanding engaging position. The engagement head has a plurality of wafer support features which support the far edges of a group of wafers. The near edges of the wafers are held by proximal wafer contact heads.
    Type: Grant
    Filed: October 13, 1994
    Date of Patent: January 7, 1997
    Assignee: Semitherm
    Inventors: Steven R. Thompson, Rikki S. LaBere
  • Wafer transfer apparatus
    Patent number: 5575611
    Abstract: A wafer transfer apparatus capable of simultaneously transferring multiple semiconductor wafers to and from a furnace or similar columnar wafer station. The apparatus has a cantilevered extension which extends from a main part. The extension is preferably mounted for pivotal movement. The extension has a distal engagement head mounted thereon. The distal engagement head is moved between a lateral position and an upstanding engaging position. The engagement head has a plurality of wafer support features which support the far edges of a group of wafers. The near edges of the wafers are held by proximal wafer contact heads.
    Type: Grant
    Filed: March 7, 1996
    Date of Patent: November 19, 1996
    Assignee: Semitool, Inc.
    Inventors: Steven R. Thompson, Rikki S. LaBere