Abstract: An active vibration isolator including a movable stage provides good vibration isolation performance. An active vibration isolator includes: a stage moving under thrust to position a mounted object; a vibration isolation table supporting the stage; a servo valve imparting, to the vibration isolation table, a control force that reduces vibrations of the vibration isolation table; a position/thrust obtaining unit obtaining a position of the stage on a movement track and the thrust actually applied to the stage with movement of the stage; and a vibration control FF control unit performing feed-forward control of the servo valve, based on what is obtained by the position/thrust obtaining unit, to allow the servo valve to generate a control force commensurate with vibrations of the vibration isolation table caused by the movement of the stage.

Abstract: An active vibration isolator including a movable stage provides good vibration isolation performance. An active vibration isolator includes: a stage moving under thrust to position a mounted object; a vibration isolation table supporting the stage; a servo valve imparting, to the vibration isolation table, a control force that reduces vibrations of the vibration isolation table; a position/thrust obtaining unit obtaining a position of the stage on a movement track and the thrust actually applied to the stage with movement of the stage; and a vibration control FF control unit performing feed-forward control of the servo valve, based on what is obtained by the position/thrust obtaining unit, to allow the servo valve to generate a control force commensurate with vibrations of the vibration isolation table caused by the movement of the stage.