Abstract: A method of etching silicon oxide on a surface of a substrate is provided. The method comprises alternately repeating heating the substrate to a heating temperature of 60° C. or higher, supplying hydrogen fluoride gas and ammonia gas onto the substrate to react with the silicon oxide, and modifying the silicon oxide to obtain a reaction product, and removing at least a portion of the reaction product from the substrate while stopping the supply of the above gases and continuing to heat the substrate at the heating temperature; and when a process gas that is at least one of the hydrogen fluoride gas and the ammonia gas is supplied, while continuing to supply the process gas from an upstream side of a flow path, closing a valve disposed in the flow path to pressurize the process gas in the flow path, and then opening the valve.

Abstract: A method of etching silicon oxide on a surface of a substrate is provided. The method comprises alternately repeating heating the substrate to a heating temperature of 60° C. or higher, supplying hydrogen fluoride gas and ammonia gas onto the substrate to react with the silicon oxide, and modifying the silicon oxide to obtain a reaction product, and removing at least a portion of the reaction product from the substrate while stopping the supply of the above gases and continuing to heat the substrate at the heating temperature; and when a process gas that is at least one of the hydrogen fluoride gas and the ammonia gas is supplied, while continuing to supply the process gas from an upstream side of a flow path, closing a valve disposed in the flow path to pressurize the process gas in the flow path, and then opening the valve.

Abstract: Disclosed is a method for removing, from a processing target substrate having an insulating film with a predetermined pattern formed thereon, a silicon-containing oxide film formed in a silicon portion of a bottom of the pattern. The method includes: removing the silicon-containing oxide film formed on the bottom of the pattern by ionic anisotropic plasma etching using plasma of a carbon-based gas; removing a remaining portion of the silicon-containing oxide film after the anisotropic plasma etching, by chemical etching; and removing a residue remaining after the chemical etching.

Abstract: A fuel supply system for an internal combustion engine includes a heat exchanger that has a heat exchanging wall between a liquefied fuel passage and an engine coolant passage. Heated and vaporized fuel flowing out from the liquefied fuel passage of the heat exchanger is supplied to the internal combustion engine. A flow rate of liquefied fuel supplied to the liquefied fuel passage of the heat exchanger is set. A flow rate of engine coolant supplied to the engine coolant passage of the heat exchanger is determined on the basis of a temperature of the engine coolant supplied to the engine coolant passage of the heat exchanger such that nucleate boiling or transition boiling of the liquefied fuel in the set flow rate occurs near a boundary between nucleate boiling and transition boiling in the liquefied fuel passage.

Abstract: A fuel feed system which causes liquid fuel to evaporate so as to feed gaseous fuel, provided with an evaporator which includes a heater which heats the liquid fuel to vaporize it and an electric heater which adjusts the temperature of the heater. The heater has a heat conduction surface which supplies heat to the liquid fuel. A difference between the temperature of the heat conduction surface of the heater and the boiling point of the fuel at the evaporator is used as the basis to change the temperature of the heater and adjust the heat flux at the heat conduction surface.

Abstract: A fuel supply system for an internal combustion engine includes a heat exchanger that has a heat exchanging wall between a liquefied fuel passage and an engine coolant passage. Heated and vaporized fuel flowing out from the liquefied fuel passage of the heat exchanger is supplied to the internal combustion engine. A flow rate of liquefied fuel supplied to the liquefied fuel passage of the heat exchanger is set. A flow rate of engine coolant supplied to the engine coolant passage of the heat exchanger is determined on the basis of a temperature of the engine coolant supplied to the engine coolant passage of the heat exchanger such that nucleate boiling or transition boiling of the liquefied fuel in the set flow rate occurs near a boundary between nucleate boiling and transition boiling in the liquefied fuel passage.

Abstract: A fuel feed system which causes liquid fuel to evaporate so as to feed gaseous fuel, provided with an evaporator which includes a heater which heats the liquid fuel to vaporize it and an electric heater which adjusts the temperature of the heater. The heater has a heat conduction surface which supplies heat to the liquid fuel. A difference between the temperature of the heat conduction surface of the heater and the boiling point of the fuel at the evaporator is used as the basis to change the temperature of the heater and adjust the heat flux at the heat conduction surface.

Abstract: A control system of an internal combustion engine in which as fuel, a first fuel of ammonia and a second fuel easier to burn than ammonia are used. These two types of fuel are burned in the combustion chamber. A basic ammonia ratio is set in accordance with an engine load and engine speed. The set basic ammonia ratio is corrected based on at least one of a combustion state, knocking strength, temperature of an exhaust gas or temperature of a catalyst arranged in an engine exhaust passage, NOx concentration in the exhaust gas, actual compression ratio, air-fuel ratio, and fuel properties.

Abstract: An internal combustion engine in which ammonia which is fed into a combustion chamber is ignited by an ignition device which is arranged in the combustion chamber. As this ignition device, at least one plasma jet ignition plug which emits a plasma jet or a plurality of spark plugs which generate sparks are used.

Abstract: Inside an engine compartment of a vehicle, an ammonia concentration sensor is arranged above a liquid ammonia injector which is attached to an internal combustion engine body and to the rear in a direction of progression of the vehicle. An ammonia concentration which is detected by the ammonia concentration sensor is used as the basis to judge if ammonia is leaked.

Abstract: A direct fuel injection, spark-ignition internal combustion engine wherein fuel mainly proceeds toward a spark plug side wall of a cavity along a bottom wall, is deflected by the spark plug side wall and is led to the vicinity of a spark plug. In the engine, the spark plug side wall of the cavity is provided with a deflecting portion inclined toward the inside of the cavity. A first part of the deflecting portion provided on both sides of the spark plug side wall functions to lead the fuel to the vicinity of the spark plug. A second part of the deflecting portion on the central portion of the spark plug side wall functions to lead the fuel to a region neighboring the side of the fuel injection valve from the vicinity of the spark plug.

Abstract: A fuel injection valve for an internal combustion engine includes an injector body and an adapter. The injector body includes a single fuel injection hole and the adapter includes a concave portion defining a dead volume portion and a pillar extending from a bottom surface of the concave portion toward the fuel injection hole formed in the injector body. Fuel injected through the fuel injection hole into the dead volume portion collides with a top surface of the pillar to form a cone-like fuel flow pattern and a large portion of the fuel can directly flow into injected fuel paths formed in the adapted without attaching to and collecting on surfaces of various portions of the adapter. Thus, stable fuel injection from the injected fuel paths can be obtained.