Patents by Inventor Risa Yoshimoto

Risa Yoshimoto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Illumination optical system, exposure apparatus, device manufacturing method, compensation filter, and exposure optical system
    Patent number: 8908151
    Abstract: An illumination optical system is one for illuminating a surface to be illuminated with light from a light source, which has a distribution forming optical system including an optical integrator and forming a pupil intensity distribution on an illumination pupil located behind the optical integrator, and an optical attenuator arranged on a predetermined surface in an optical path behind the optical integrator and having an attenuation characteristic of varying an attenuation rate depending upon an angle of incidence to the predetermined surface.
    Type: Grant
    Filed: February 5, 2009
    Date of Patent: December 9, 2014
    Assignee: Nikon Corporation
    Inventors: Kouji Muramatsu, Osamu Tanitsu, Hirohisa Tanaka, Masaya Yamamoto, Norio Miyake, Yasushi Mizuno, Ryuji Takaya, Risa Yoshimoto, Hiroyuki Hirota
  • Illumination optical system, exposure apparatus, device manufacturing method, compensation filter, and exposure optical system
    Publication number: 20090284727
    Abstract: An illumination optical system is one for illuminating a surface to be illuminated with light from a light source, which has a distribution forming optical system including an optical integrator and forming a pupil intensity distribution on an illumination pupil located behind the optical integrator, and an optical attenuator arranged on a predetermined surface in an optical path behind the optical integrator and having an attenuation characteristic of varying an attenuation rate depending upon an angle of incidence to the predetermined surface.
    Type: Application
    Filed: February 5, 2009
    Publication date: November 19, 2009
    Applicant: NIKON CORPORATION
    Inventors: Kouji Muramatsu, Osamu Tanitsu, Hirohisa Tanaka, Masaya Yamamoto, Norio Miyake, Yasushi Mizuno, Ryuji Takaya, Risa Yoshimoto, Hiroyuki Hirota