Abstract: A measurement arrangement for measuring the travel time of a laser beam, comprising a laser device configured to emit laser light with a laser wavelength toward the surrounding environment and one or more light detectors configured to absorb inbound laser light after it has been reflected back towards the measurement arrangement. The measurement arrangement also comprises an order-sorting filter configured to transmit laser light only in a first wavelength range, and a scanning Fabry-Pérot interferometer configured to transmit laser light only in a cavity resonance wavelength range. The first wavelength range is broader than the cavity resonance wavelength range, and a control unit is configured to shift the center of the cavity resonance wavelength range when the temperature of the laser device changes.

Abstract: A measurement arrangement for measuring the travel time of a laser beam, comprising a laser device configured to emit laser light with a laser wavelength toward the surrounding environment and one or more light detectors configured to absorb inbound laser light after it has been reflected back towards the measurement arrangement. The measurement arrangement also comprises an order-sorting filter configured to transmit laser light only in a first wavelength range, and a scanning Fabry-Pérot interferometer configured to transmit laser light only in a cavity resonance wavelength range. The first wavelength range is broader than the cavity resonance wavelength range, and a control unit is configured to shift the center of the cavity resonance wavelength range when the temperature of the laser device changes.

Abstract: A method for manufacturing microelectromechanical flexural resonators with a deforming element that has an elongate body extending along a spring axis. A deforming element is positioned on the semiconductor wafer with a defined nominal n-type doping concentration such that a crystal orientation angle is formed between the spring axis of the deforming element and a crystal axis of the silicon semiconductor wafer. The combination of the crystal orientation angle and the nominal n-type doping concentration is adjusted to a specific range, based on total frequency error of the deforming element in a broad temperature range. The combination is optimized to a range where also sensitivity to variations in the material properties is minimized.

Abstract: A method for manufacturing microelectromechanical flexural resonators with a deforming element that has an elongate body extending along a spring axis. A deforming element is positioned on the semiconductor wafer with a defined nominal n-type doping concentration such that a crystal orientation angle is formed between the spring axis of the deforming element and a crystal axis of the silicon semiconductor wafer. The combination of the crystal orientation angle and the nominal n-type doping concentration is adjusted to a specific range, based on total frequency error of the deforming element in a broad temperature range. The combination is optimized to a range where also sensitivity to variations in the material properties is minimized.

Abstract: The invention relates to measurement devices used in the measurement of acceleration, and more specifically, to micromechanical acceleration sensors. The invention seeks to offer an improved method for the measurement of acceleration directed to three or two dimensions using a micromechanical acceleration sensor as well as an improved micromechanical acceleration sensor. Using this invention, the functional reliability of a sensor can be monitored in constant use, and it is suitable for use particularly in small-sized micromechanical acceleration sensor solutions measuring in relation to several axes.

Abstract: The invention relates to measurement devices used in the measurement of acceleration, and more specifically, to micromechanical acceleration sensors. The invention seeks to offer an improved method for the measurement of acceleration directed to three or two dimensions using a micromechanical acceleration sensor as well as an improved micromechanical acceleration sensor. Using this invention, the functional reliability of a sensor can be monitored in constant use, and it is suitable for use particularly in small-sized micromechanical acceleration sensor solutions measuring in relation to several axes.