Patents by Inventor Rita Dukes

Rita Dukes has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ceramic substrate support
    Patent number: 6730175
    Abstract: A substrate support assembly for supporting a substrate during processing is provided. In one embodiment, a support assembly includes a ceramic body having an embedded heating element and a base plate. The base plate and the ceramic body define a channel therebetween adapted to supply purge gas to a perimeter of a substrate disposed on the support assembly. The base plate is fastened to the body by brazing, adhering, fastening, press fitting or by mating engaging portions of a retention device such as a bayonet fitting.
    Type: Grant
    Filed: January 22, 2002
    Date of Patent: May 4, 2004
    Assignee: Applied Materials, Inc.
    Inventors: Joseph Yudovsky, Salvador P. Umotoy, Shamouil Shamouilian, Ron Rose, Rita Dukes, Xiaoxiong Yuan
  • Ceramic substrate support
    Publication number: 20030136520
    Abstract: A substrate support assembly for supporting a substrate during processing is provided. In one embodiment, a support assembly includes a ceramic body having an embedded heating element and a base plate. The base plate and the ceramic body define a channel therebetween adapted to supply purge gas to a perimeter of a substrate disposed on the support assembly. The base plate is fastened to the body by brazing, adhering, fastening, press fitting or by mating engaging portions of a retention device such as a bayonet fitting.
    Type: Application
    Filed: January 22, 2002
    Publication date: July 24, 2003
    Applicant: Applied Materials, Inc.
    Inventors: Joseph Yudovsky, Salvador P. Umotoy, Shamouil Shamouilian, Ron Rose, Rita Dukes, Xiaoxiong Yuan