Patents by Inventor Rithu K. Bhonsle

Rithu K. Bhonsle has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11569258
    Abstract: Some embodiments include a method of forming stacked memory decks. A first deck has first memory cells arranged in first tiers disposed one atop another, and has a first channel-material pillar extending through the first tiers. An inter-deck structure is over the first deck. The inter-deck structure includes an insulative expanse, and a region extending through the insulative expanse and directly over the first channel-material pillar. The region includes an etch-stop structure. A second deck is formed over the inter-deck structure. The second deck has second memory cells arranged in second tiers disposed one atop another. An opening is formed to extend through the second tiers and to the etch-stop structure. The opening is subsequently extended through the etch-stop structure. A second channel-material pillar is formed within the opening and is coupled to the first channel-material pillar. Some embodiments include integrated assemblies.
    Type: Grant
    Filed: July 20, 2020
    Date of Patent: January 31, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Liu Liu, David Daycock, Rithu K. Bhonsle, Giovanni Mazzone, Narula Bilik, Jordan D. Greenlee, Minsoo Lee, Benben Li
  • Patent number: 11088017
    Abstract: A method of forming a semiconductor structure includes forming a sacrificial material over a stack comprising alternating levels of a dielectric material and another material, forming an opening through the sacrificial material and at least some of the alternating levels of the dielectric material and the another material, forming at least one oxide material in the opening and overlying surfaces of the sacrificial material, an uppermost surface of the at least one oxide material extending more distal from a surface of a substrate than an uppermost level of the dielectric material and the another material, planarizing at least a portion of the at least one oxide material to expose a portion of the sacrificial material, and removing the sacrificial material while the uppermost surface of the at least one oxide material remains more distal from the surface of the substrate than the uppermost level of the alternating levels of the dielectric material and the another material.
    Type: Grant
    Filed: March 2, 2020
    Date of Patent: August 10, 2021
    Assignee: Micron Technology, Inc.
    Inventors: John B. Matovu, David S. Meyaard, Gowrisankar Damarla, Sri Sai Sivakumar Vegunta, Kunal Shrotri, Shashank Saraf, Kevin R. Gast, Jivaan Kishore Jhothiraman, Suresh Ramarajan, Lifang Xu, Rithu K. Bhonsle, Rutuparna Narulkar, Matthew J. King
  • Publication number: 20200350333
    Abstract: Some embodiments include a method of forming stacked memory decks. A first deck has first memory cells arranged in first tiers disposed one atop another, and has a first channel-material pillar extending through the first tiers. An inter-deck structure is over the first deck. The inter-deck structure includes an insulative expanse, and a region extending through the insulative expanse and directly over the first channel-material pillar. The region includes an etch-stop structure. A second deck is formed over the inter-deck structure. The second deck has second memory cells arranged in second tiers disposed one atop another. An opening is formed to extend through the second tiers and to the etch-stop structure. The opening is subsequently extended through the etch-stop structure. A second channel-material pillar is formed within the opening and is coupled to the first channel-material pillar. Some embodiments include integrated assemblies.
    Type: Application
    Filed: July 20, 2020
    Publication date: November 5, 2020
    Applicant: Micron Technology, Inc.
    Inventors: Liu Liu, David Daycock, Rithu K. Bhonsle, Giovanni Mazzone, Narula Bilik, Jordan D. Greenlee, Minsoo Lee, Benben Li
  • Patent number: 10762939
    Abstract: Computer memory technology is disclosed. In one example, a method for isolating computer memory blocks in a memory array from one another can include forming an opening between adjacent blocks of memory structures. The method can also include forming a protective liner layer on at least the memory structures. The method can further include disposing isolating material in the opening and on the protective liner layer. The method can even further include removing the isolating material on the protective liner layer. The method can additionally include removing the protective liner layer on the memory structures. Associated devices and systems are also disclosed.
    Type: Grant
    Filed: July 1, 2017
    Date of Patent: September 1, 2020
    Assignee: Intel Corporation
    Inventors: Christopher J. Larsen, David A. Daycock, Qian Tao, Saniya Rathod, Devesh K. Datta, Srivardhan Gowda, Rithu K. Bhonsle
  • Patent number: 10748921
    Abstract: Some embodiments include a method of forming stacked memory decks. A first deck has first memory cells arranged in first tiers disposed one atop another, and has a first channel-material pillar extending through the first tiers. An inter-deck structure is over the first deck. The inter-deck structure includes an insulative expanse, and a region extending through the insulative expanse and directly over the first channel-material pillar. The region includes an etch-stop structure. A second deck is formed over the inter-deck structure. The second deck has second memory cells arranged in second tiers disposed one atop another. An opening is formed to extend through the second tiers and to the etch-stop structure. The opening is subsequently extended through the etch-stop structure. A second channel-material pillar is formed within the opening and is coupled to the first channel-material pillar. Some embodiments include integrated assemblies.
    Type: Grant
    Filed: October 25, 2018
    Date of Patent: August 18, 2020
    Assignee: Micron Technology, Inc.
    Inventors: Liu Liu, David Daycock, Rithu K. Bhonsle, Giovanni Mazzone, Narula Bilik, Jordan D. Greenlee, Minsoo Lee, Benben Li
  • Publication number: 20200203220
    Abstract: A method of forming a semiconductor structure includes forming a sacrificial material over a stack comprising alternating levels of a dielectric material and another material, forming an opening through the sacrificial material and at least some of the alternating levels of the dielectric material and the another material, forming at least one oxide material in the opening and overlying surfaces of the sacrificial material, an uppermost surface of the at least one oxide material extending more distal from a surface of a substrate than an uppermost level of the dielectric material and the another material, planarizing at least a portion of the at least one oxide material to expose a portion of the sacrificial material, and removing the sacrificial material while the uppermost surface of the at least one oxide material remains more distal from the surface of the substrate than the uppermost level of the alternating levels of the dielectric material and the another material.
    Type: Application
    Filed: March 2, 2020
    Publication date: June 25, 2020
    Inventors: John B. Matovu, David S. Meyaard, Gowrisankar Damarla, Sri Sai Sivakumar Vegunta, Kunal Shrotri, Shashank Saraf, Kevin R. Gast, Jivaan Kishore Jhothiraman, Suresh Ramarajan, Lifang Xu, Rithu K. Bhonsle, Rutuparna Narulkar, Matthew J. King
  • Publication number: 20200135751
    Abstract: Some embodiments include a method of forming stacked memory decks. A first deck has first memory cells arranged in first tiers disposed one atop another, and has a first channel-material pillar extending through the first tiers. An inter-deck structure is over the first deck. The inter-deck structure includes an insulative expanse, and a region extending through the insulative expanse and directly over the first channel-material pillar. The region includes an etch-stop structure. A second deck is formed over the inter-deck structure. The second deck has second memory cells arranged in second tiers disposed one atop another. An opening is formed to extend through the second tiers and to the etch-stop structure. The opening is subsequently extended through the etch-stop structure. A second channel-material pillar is formed within the opening and is coupled to the first channel-material pillar. Some embodiments include integrated assemblies.
    Type: Application
    Filed: October 25, 2018
    Publication date: April 30, 2020
    Applicant: Micron Technology, Inc.
    Inventors: Liu Liu, David Daycock, Rithu K. Bhonsle, Giovanni Mazzone, Narula Bilik, Jordan D. Greenlee, Minsoo Lee, Benben Li
  • Patent number: 10600682
    Abstract: A method of forming a semiconductor structure includes forming a sacrificial material over a stack comprising alternating levels of a dielectric material and another material, forming an opening through the sacrificial material and at least some of the alternating levels of the dielectric material and the another material, forming at least one oxide material in the opening and overlying surfaces of the sacrificial material, an uppermost surface of the at least one oxide material extending more distal from a surface of a substrate than an uppermost level of the dielectric material and the another material, planarizing at least a portion of the at least one oxide material to expose a portion of the sacrificial material, and removing the sacrificial material while the uppermost surface of the at least one oxide material remains more distal from the surface of the substrate than the uppermost level of the alternating levels of the dielectric material and the another material.
    Type: Grant
    Filed: October 26, 2018
    Date of Patent: March 24, 2020
    Assignee: Micron Technology, Inc.
    Inventors: John B. Matovu, David S. Meyaard, Gowrisankar Damarla, Sri Sai Sivakumar Vegunta, Kunal Shrotri, Shashank Saraf, Kevin R. Gast, Jivaan Kishore Jhothiraman, Suresh Ramarajan, Lifang Xu, Rithu K. Bhonsle, Rutuparna Narulkar, Matthew J. King
  • Publication number: 20190206727
    Abstract: A method of forming a semiconductor structure includes forming a sacrificial material over a stack comprising alternating levels of a dielectric material and another material, forming an opening through the sacrificial material and at least some of the alternating levels of the dielectric material and the another material, forming at least one oxide material in the opening and overlying surfaces of the sacrificial material, an uppermost surface of the at least one oxide material extending more distal from a surface of a substrate than an uppermost level of the dielectric material and the another material, planarizing at least a portion of the at least one oxide material to expose a portion of the sacrificial material, and removing the sacrificial material while the uppermost surface of the at least one oxide material remains more distal from the surface of the substrate than the uppermost level of the alternating levels of the dielectric material and the another material.
    Type: Application
    Filed: October 26, 2018
    Publication date: July 4, 2019
    Inventors: John B. Matovu, David S. Meyaard, Gowrisankar Damarla, Sri Sai Sivakumar Vegunta, Kunal Shrotri, Shashank Saraf, Kevin R. Gast, Jivaan Kishore Jhothiraman, Suresh Ramarajan, Lifang Xu, Rithu K. Bhonsle, Rutuparna Narulkar, Matthew J. King
  • Patent number: 10269625
    Abstract: A method of forming a semiconductor structure includes forming a sacrificial material over a stack comprising alternating levels of a dielectric material and another material, forming an opening through the sacrificial material and at least some of the alternating levels of the dielectric material and the another material, forming at least one oxide material in the opening and overlying surfaces of the sacrificial material, an uppermost surface of the at least one oxide material extending more distal from a surface of a substrate than an uppermost level of the dielectric material and the another material, planarizing at least a portion of the at least one oxide material to expose a portion of the sacrificial material, and removing the sacrificial material while the uppermost surface of the at least one oxide material remains more distal from the surface of the substrate than the uppermost level of the alternating levels of the dielectric material and the another material.
    Type: Grant
    Filed: December 28, 2017
    Date of Patent: April 23, 2019
    Assignee: Micron Technology, Inc.
    Inventors: John B. Matovu, David S. Meyaard, Gowrisankar Damarla, Sri Sai Sivakumar Vegunta, Kunal Shrotri, Shashank Saraf, Kevin R. Gast, Jivaan Kishore Jhothiraman, Suresh Ramarajan, Lifang Xu, Rithu K. Bhonsle, Rutuparna Narulkar, Matthew J. King
  • Publication number: 20190005996
    Abstract: Computer memory technology is disclosed. In one example, a method for isolating computer memory blocks in a memory array from one another can include forming an opening between adjacent blocks of memory structures. The method can also include forming a protective liner layer on at least the memory structures. The method can further include disposing isolating material in the opening and on the protective liner layer. The method can even further include removing the isolating material on the protective liner layer. The method can additionally include removing the protective liner layer on the memory structures. Associated devices and systems are also disclosed.
    Type: Application
    Filed: July 1, 2017
    Publication date: January 3, 2019
    Applicant: Intel Corporation
    Inventors: Christopher J. Larsen, David A. Daycock, Qian Tao, Saniya Rathod, Devesh K. Datta, Srivardhan Gowda, Rithu K. Bhonsle