Abstract: In one general aspect, an apparatus can include a first trench oxide disposed within a first trench of an epitaxial layer and having a trench bottom oxide disposed below a gate portion of the first trench oxide. The apparatus can include a second trench disposed lateral to the first trench. The trench bottom oxide portion of the first oxide can have a thickness greater than a distance within the epitaxial layer from the first trench to the second trench.

Abstract: This document discusses, among other things, a semiconductor device including a first metal layer coupled to a source region and a second metal layer coupled to a gate structure, wherein at least a portion of the first and second metal layers overlap vertically.

Abstract: A semiconductor device includes a drift region, a well region extending above the drift region, an active trench including sidewalls and a bottom, the active trench extending through the well region and into the drift region and having at least portions of its sidewalls and bottom lined with dielectric material. The device further includes a shield disposed within the active trench and separated from the sidewalls of the active trench by the dielectric material, a gate disposed within the active trench above the first shield and separated therefrom by inter-electrode dielectric material, and source regions formed in the well region adjacent the active trench. The gate is separated from the sidewalls of the active trench by the dielectric material. The shield and the gate are made of materials having different work functions.

Abstract: This document discusses, among other things, a semiconductor device including a first metal layer coupled to a source region and a second metal layer coupled to a gate structure, wherein at least a portion of the first and second metal layers overlap vertically.

Abstract: In one general aspect, an apparatus can include a first trench oxide disposed within a first trench of an epitaxial layer and having a trench bottom oxide disposed below a gate portion of the first trench oxide. The apparatus can include a second trench disposed lateral to the first trench. The trench bottom oxide portion of the first oxide can have a thickness greater than a distance within the epitaxial layer from the first trench to the second trench.

Abstract: A semiconductor device includes a drift region, a well region extending above the drift region, an active trench including sidewalls and a bottom, the active trench extending through the well region and into the drift region and having at least portions of its sidewalls and bottom lined with dielectric material. The device further includes a shield disposed within the active trench and separated from the sidewalls of the active trench by the dielectric material, a gate disposed within the active trench above the first shield and separated therefrom by inter-electrode dielectric material, and source regions formed in the well region adjacent the active trench. The gate is separated from the sidewalls of the active trench by the dielectric material. The shield and the gate are made of materials having different work functions.

Abstract: A trench power semiconductor device including a recessed termination structure.

Abstract: A semiconductor device including a schottky device and a trench type semiconductor switching device such as a MOSFET formed in a common die.

Abstract: A semiconductor device including a schottky device and a trench type semiconductor switching device such as a MOSFET formed in a common die.

Abstract: A semiconductor device including a schottky device and a trench type semiconductor switching device such as a MOSFET formed in a common die.

Abstract: A process for manufacturing a semiconductor device of the trench variety with reduced feature sizes and improved characteristics which process includes forming a termination structure having a field oxide disposed in a recess below the surface of the semiconductor die in which the active elements of the device are formed, and forming source regions after the major thermal steps have been performed.

Abstract: A semiconductor device including a schottky device and a trench type semiconductor switching device such as a MOSFET formed in a common die.

Abstract: A power MOSFET has a plurality of spaced rows of parallel coextensive trenches. The trenches are lined with a gate oxide and are filled with conductive polysilicon. Spaced narrow polysilicon strips overlie the silicon surface and connects adjacent trenches to one another. The source contact is made at a location remote from the trenches and between the rows of trenches. The trenches are 1.8 microns deep, are 0.6 microns wide and are spaced by about 0.6 microns or greater. The device has a very low figure of merit and is useful especially in low voltage circuits.

Abstract: A trench power semiconductor device including a recessed termination structure.

Abstract: A process for manufacturing a semiconductor device of the trench variety with reduced feature sizes and improved characteristics which process includes forming a termination structure having a field oxide disposed in a recess below the surface of the semiconductor die in which the active elements of the device are formed, and forming source regions after the major thermal steps have been performed.

Abstract: The tops of the conductive polysilicon gates of a trench device have a layer of a silicide such as titanium silicide which is more conductive than the polysilicon gate, thereby reducing gate resistance.