Patents by Inventor Riyunsuke Kasamatsu

Riyunsuke Kasamatsu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for manufacturing semiconductor substrates
    Publication number: 20070114458
    Abstract: This apparatus for manufacturing semiconductor substrates has support disks and holding units holding semiconductor substrates on the support disks. The holding unit has a stopper which is formed of a conductive material and holds the brim of the semiconductor substrate, a stopper holder which supports the stopper at the outer circumferential portion thereof, a retaining member which retains the stopper to the support disk, and a heating unit which heats the stopper.
    Type: Application
    Filed: August 24, 2006
    Publication date: May 24, 2007
    Inventors: Seiichi Nakamura, Hideki Nishihata, Riyunsuke Kasamatsu, Kazunori Tsubuku, Akira Bando, Nobuo Tsumaki, Tomoji Watanabe, Kazuo Mera, Tsuneo Hayashi, Yoichi Kurosawa