Abstract: The invention relates to a micro multi-layered thin film hydrogen fuel cell system, which includes a reformer comprising a flow path formed at a side of a substrate and a catalyst in the flow path to reform a fuel into hydrogen. The fuel cell system also includes a cell for generating current using the hydrogen from the reformer. The cell comprises a pair of first and second substrates covering the substrate of the reformer with a membrane electrode assembly disposed between the pair of substrates with a catalyst formed thereon. The fuel cell system further includes a combustor for burning remaining fuel gas to generate heat. The combustor comprises a substrate disposed at an outer side of the second substrate of the cell, and a flow path formed in the substrate with a catalyst formed thereon.

Abstract: The invention relates to a reformer with superior heat characteristics for supplying hydrogen gas as fuel to a fuel cell of a fuel cell system. The reformer includes a base having an evaporating part, a reforming part and flow paths each formed in the evaporating part and the reforming part. The reformer also includes heaters each attached on the base corresponding to the positions of the evaporating part and the reforming section. The reformer further includes a catalyst disposed in the reforming section of the base and a porous part integrally formed in a portion of the base extending from the evaporating part to the heater. The reformer has the porous part including nano-pores to increase heat absorption, preventing heat losses. This allows increased heat efficiency and sufficient heat supply with minimal energy, thereby enhancing operational characteristics of the reformer.

Abstract: The invention relates to a thin micro reforming apparatus used in a fuel cell system. The reforming apparatus includes a substrate having a flow path formed therein, and a fuel inlet portion for introducing fuel to the flow path of the substrate. The fuel inlet portion allows the fuel to flow through a predetermined length of a channel, thereby preheating the fuel. The reforming apparatus also includes an evaporator having a flow path for gasifying liquid fuel, and a reformer for reforming fuel into hydrogen gas via heat absorption reaction. The reforming apparatus further includes a CO remover for removing CO gas contained in the hydrogen gas via heat generation reaction, and a cover for sealing the flow paths of the substrate. The channel of the fuel inlet portion surrounds the evaporator, reformer and CO remover, thereby facilitating insulation at the sides of the reforming apparatus and increasing heat efficiency.

Abstract: The invention relates to a micro-reformer using a liquid fuel such as methanol and a manufacturing method thereof. The reformer for producing hydrogen gas from the liquid fuel includes a first substrate having a first grooved path and a catalyst layer, and a second substrate having a second grooved path and a catalyst layer, the first and second grooved paths are overlapped on each other forming a micro-channel. The micro-channel has a fuel inlet, a hydrogen outlet, a reforming section, and a carbon monoxide removing section with heating means disposed therein. Although reduced in size, the reformer allows increased hydrogen emission amount due to increased area of the inner path, and is operable with low power due to effective disposition of a heater. This allows manufacturing at low costs and mass-production via semiconductor process.

Abstract: A MEMS structure includes a floating space formed on the upper silicon layer by a first dry etching, and then dry etched to a predeterminded depth on the lower silicon layer by etching gas supplied through the etched holes from which the oxide film has been removed at the bottom surface thereof in a second dry etching process, so as to float the movable portion; and the oxide film for preventing electrical short circuit remaining on the lower surface of the movable portion so as to correspond to the lower silicon layer leaving the floating space therebetween.

Abstract: Disclosed herein is a cantilever-type PLC optical attenuator. The optical attenuator includes a base substrate made of silicon, an input waveguide, and output waveguide. Front portions of the upper and lower silicon substrates around the output waveguide are thinner than rear portions of the upper and lower silicon substrates around the output waveguide to provide a cantilever part having upper and lower cantilever substrate parts. A first electrode is provided on a bottom of the lower cantilever substrate part, and a second electrode is provided on the base substrate to electromagnetically correspond to the first electrode. When a voltage is applied between the first and second electrodes, the cantilever part moves up and down by an electromagnetic force, thus controlling the output light.

Abstract: The present invention relates to a microlens fabrication method for fabricating a non-global microlens from a multi-layer substrate. In the microlens fabrication method of the invention, a first layer of a predetermined etching rate is formed first, and then a second layer is formed on the first layer. The second layer has a predetermined etching rate different from that of the first layer. A mask pattern in use for etching is formed on the second layer, and then the first and second layers are etched to form a non-spherical lens contour therein.

Abstract: A multi-channel optical attenuator having a Planar Lightwave Circuit (PLC) structure for controlling a light path by waveguides includes a bonding medium layer of polymer that is used to bond an actuator structure and a support structure. A silicon layer is provided with waveguides for transmitting optical signals from an optical signal transmission line and an actuator formed at a predetermined portion thereof. The waveguides are inserted into cavities of the bonding medium layer. A support layer is attached to the bonding medium layer at an opposite face to a face where the bonding medium layer is bonded with a silicon substrate.

Abstract: Disclosed is a multi-channel optical attenuator having a Planar Lightwave Circuit (PLC) structure for controlling a light path by waveguides and manufacturing method thereof. In this optical attenuator, a bonding medium layer of polymer is used to bond an actuator structure and a support structure. A silicon layer is provided with waveguides for transmitting optical signals from an optical signal transmission line and an activator formed at a predetermined portion thereof. The waveguides are inserted into cavities of the bonding medium layer. A support layer is attached to the bonding medium layer at an opposite face to a face where the bonding medium layer is bonded with a silicon substrate.