Patents by Inventor Rob REILINK

Rob REILINK has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Object stage bearing for lithographic apparatus
    Patent number: 11442369
    Abstract: An object stage bearing system can include an object stage, a hollow shaft coupled to the object stage, and an in-vacuum gas bearing assembly coupled to the hollow shaft and the object stage. The in-vacuum gas bearing assembly can include a gas bearing, a scavenging groove, and a vacuum groove. The gas bearing is disposed along an inner wall of the in-vacuum gas bearing assembly and along an external wall of the hollow shaft. The scavenging groove is disposed along the inner wall such that the scavenging groove is isolated from the gas bearing. The vacuum groove is disposed along the inner wall such that the vacuum groove is isolated from the scavenging groove and the gas bearing.
    Type: Grant
    Filed: November 7, 2018
    Date of Patent: September 13, 2022
    Assignee: ASML Netherlands B.V.
    Inventors: Yang-Shan Huang, Pieter Cornelis Johan De Jager, Rob Reilink, Christiaan Louis Valentin, Jasper Leonardus Johannes Scholten, Antonie Hendrik Verweij, Edwin Van Horne
  • Object Stage Bearing for Lithographic Apparatus
    Publication number: 20200333717
    Abstract: An object stage bearing system can include an object stage, a hollow shaft coupled to the object stage, and an in-vacuum gas bearing assembly coupled to the hollow shaft and the object stage. The in-vacuum gas bearing assembly can include a gas bearing, a scavenging groove, and a vacuum groove. The gas bearing is disposed along an inner wall of the in-vacuum gas bearing assembly and along an external wall of the hollow shaft. The scavenging groove is disposed along the inner wall such that the scavenging groove is isolated from the gas bearing. The vacuum groove is disposed along the inner wall such that the vacuum groove is isolated from the scavenging groove and the gas bearing.
    Type: Application
    Filed: November 7, 2018
    Publication date: October 22, 2020
    Applicant: ASML Netherlands B.V.
    Inventors: Yang-Shan HUANG, Pieter Cornelis Johan DE JAGER, Rob REILINK, Christiaan Louis VALENTIN, Jasper Leonardus Johannes SCHOLTEN, Antonie Hendrik VERWEIJ, Edwin VAN HORNE