Patents by Inventor Rob Vink

Rob Vink has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Illumination system coherence remover with two sets of stepped mirrors
    Patent number: 8164740
    Abstract: A coherence remover is provided. In an embodiment the coherence remover includes a first mirror and a second mirror coupled to the first mirror. The coherence remover is configured to receive an input beam. Each of the first and second mirrors is configured to reflect a respective portion of the input beam to produce respective one or more intermediate beams. The intermediate beams collectively form an output beam that has a reduced coherence compared to the input beam.
    Type: Grant
    Filed: December 4, 2008
    Date of Patent: April 24, 2012
    Assignees: ASML Holding N.V., ASML Netherlands B.V.
    Inventors: Huibert Visser, Jacob Fredrik Friso Klinkhamer, Lev Ryzhikov, Scott D. Coston, Adel Joobeur, Rob Vink, Yevgeniy Shmarev
  • Illumination system coherence remover with a series of partially reflective surfaces
    Patent number: 8159651
    Abstract: A coherence remover includes a first partially reflective surface and a second partially reflective surface. The coherence remover is configured to receive an input beam. Each of the first and second reflective surfaces is configured to reflect a respective portion of the input beam to produce respective one or more intermediate beams. The intermediate beams collectively form an output beam that has a reduced coherence compared to the input beam.
    Type: Grant
    Filed: December 4, 2008
    Date of Patent: April 17, 2012
    Assignees: ASML Holding N.V., ASML Netherlands B.V.
    Inventors: Huibert Visser, Jacob Fredrik Friso Klinkhamer, Lev Ryzhikov, Scott D. Coston, Adel Joobeur, Rob Vink, Yevgeniy Shmarev
  • Illumination System
    Publication number: 20090168072
    Abstract: A coherence remover includes a first partially reflective surface and a second partially reflective surface. The coherence remover is configured to receive an input beam. Each of the first and second reflective surfaces is configured to reflect a respective portion of the input beam to produce respective one or more intermediate beams. The intermediate beams collectively form an output beam that has a reduced coherence compared to the input beam.
    Type: Application
    Filed: December 4, 2008
    Publication date: July 2, 2009
    Applicant: ASML Netherlands B.V. and ASML Holding N.V.
    Inventors: Huibert VISSER, Jacob Fredrik Friso Klinkhamer, Lev Ryzhikov, Scott D. Coston, Adel Joobeur, Rob Vink, Yevgeniy Shmarev