Abstract: A method of operating an electronic device manufacturing system is provided which includes the steps of receiving information with an interface, wherein the information relates to an abatement system, and shutting down a process tool and an abatement tool in response to the information.

Abstract: A method for operating one or more electronic device manufacturing systems is provided, including the steps 1) performing a series of electronic device manufacturing process steps with a process tool, wherein the process tool produces effluent as a byproduct of performing the series of process steps; 2) abating the effluent with an abatement tool; 3) supplying an abatement resource to the abatement tool from a first abatement resource supply; 4) changing an abatement resource supply from the first abatement resource supply to a second abatement resource supply, wherein changing the abatement resource supply comprises: i) interrupting a flow of the abatement resource from the first abatement resource supply; and ii) beginning a flow of the abatement resource from the second abatement resource supply; and 5) continuing to perform the series of process steps with the process tool, while changing, and after changing, the abatement resource supply.

Abstract: Films containing polybenzazole polymer dissolved in a solvent can be mechanically stretched to provide biaxial orientation. The resulting dope film can be coagulated. The polymer film has improved properties in the direction in which stretching occurs.

Abstract: This invention is an antistatic thermoplastic, phase-segregated polyurethane containing, as an antistatic additive an effective amount of a monovalent metal tetraphenylboron salt, in the substantial absence of a fatty acid salt, a C.sub.6 -C.sub.30 carboxylic acid ester or phosphate ester compound.Suprisingly, it has been found that, with this particular type of polyurethane, tetraphenylboron salts are very effective antistatic additives even in the absence of enhancer compounds as were previously employed. Accordingly, the antistatic polyurethane is useful for applications such as electronics components and packaging, and other applications where static dissipative ability is needed or desirable.