Patents by Inventor Robert A. Burke

Robert A. Burke has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for Forming a Device Having Nanopillar and Cap Structures
    Publication number: 20140116981
    Abstract: A method for forming a device having nanopillar and cap structures on a substrate in which the substrate is first coated with a first resist having a first exposure dose to electron beam radiation, and that after coating the first resist with a second resist having a second exposure dose less than the first resist. Electron beam lithography is then used sequentially to form the nanopillars and cap structures or, alternatively, a template for the nanopillar and cap structures.
    Type: Application
    Filed: October 25, 2012
    Publication date: May 1, 2014
    Applicant: U.S. Army Research Laboratory ATTN: RDRL-LOC-I
    Inventors: Robert A. Burke, Alan S. Edelstein