Patents by Inventor Robert A. Calderoni

Robert A. Calderoni has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Measurement to determine plasma leakage
    Patent number: 7115210
    Abstract: Disclosed is a method and system for detecting abnormal plasma discharge that is useful in, for example, detecting plasma leakage in a reactive ion etching (RIE) chamber. The system includes electrical contacts connected to the chamber that provide an input signal to the chamber. This input signal can be generated by a radio frequency (RF) generator that is connected to the electrical contacts. A variable power controller connected to the RF generator gradually increases (ramps) the power of the input signal being supplied to the chamber.
    Type: Grant
    Filed: February 2, 2004
    Date of Patent: October 3, 2006
    Assignee: International Business Machines Corporation
    Inventors: Robert A. Calderoni, June Cline, Kellie L. Dutra, Ronald G. Meunier, Joseph P. Walko, Justin Wai-chow Wong
  • A MEASUREMENT TO DETERMINE PLASMA LEAKAGE
    Publication number: 20050167396
    Abstract: Disclosed is a method and system for detecting abnormal plasma discharge that is useful in, for example, detecting plasma leakage in a reactive ion etching (RIE) chamber. The system includes electrical contacts connected to the chamber that provide an input signal to the chamber. This input signal can be generated by a radio frequency (RF) generator that is connected to the electrical contacts. A variable power controller connected to the RF generator gradually increases (ramps) the power of the input signal being supplied to the chamber.
    Type: Application
    Filed: February 2, 2004
    Publication date: August 4, 2005
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Robert Calderoni, June Cline, Kellie Dutra, Ronald Meunier, Joseph Walko, Justin Wong