Patents by Inventor Robert A. Ferguson

Robert A. Ferguson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Laser scan sequencing and direction with respect to gas flow
    Patent number: 10328529
    Abstract: Employing laser scanning directions (20) that are oblique to and against a predominant gas flow direction (25) equalize the quality and waviness characteristics of orthogonal scribe lines (26) made by the laser scans. Positioning and sequence of multiple scan passes to form a feature wider than the width of a scribe line (26) can be controlled to enhance quality and waviness characteristics of the edges of the feature.
    Type: Grant
    Filed: August 10, 2016
    Date of Patent: June 25, 2019
    Assignee: ELECTRO SCIENTIFIC INDUSTRIES, INC
    Inventors: Daragh Finn, Robert A. Ferguson
  • LASER SCAN SEQUENCING AND DIRECTION WITH RESPECT TO GAS FLOW
    Publication number: 20170057016
    Abstract: Employing laser scanning directions (20) that are oblique to and against a predominant gas flow direction (25) equalize the quality and waviness characteristics of orthogonal scribe lines (26) made by the laser scans. Positioning and sequence of multiple scan passes to form a feature wider than the width of a scribe line (26) can be controlled to enhance quality and waviness characteristics of the edges of the feature.
    Type: Application
    Filed: August 10, 2016
    Publication date: March 2, 2017
    Inventors: Daragh Finn, Robert A. Ferguson
  • Controlled surface roughness in vacuum retention
    Patent number: 8960686
    Abstract: An apparatus, particularly a chuck for retaining a thin part for micro-machining processing, is disclosed. The chuck is formed of a plate-shaped body having a first surface and a second surface opposite the first surface. The plate-shaped body includes a light-transmissive material, and at least one of the first surface or the second surface is a roughened surface. The chuck can be incorporated into a micro-machining system using a chuck support that allows light through to backlight a processed part for inspection.
    Type: Grant
    Filed: September 30, 2011
    Date of Patent: February 24, 2015
    Assignee: Electro Scientific Industries, Inc.
    Inventor: Robert A. Ferguson
  • Controlled Surface Roughness in Vacuum Retention
    Publication number: 20130082448
    Abstract: An apparatus, particularly a chuck for retaining a thin part for micro-machining processing, is disclosed. The chuck is formed of a plate-shaped body having a first surface and a second surface opposite the first surface. The plate-shaped body includes a light-transmissive material, and at least one of the first surface or the second surface is a roughened surface. The chuck can be incorporated into a micro-machining system using a chuck support that allows light through to backlight a processed part for inspection.
    Type: Application
    Filed: September 30, 2011
    Publication date: April 4, 2013
    Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
    Inventor: Robert A. Ferguson