Patents by Inventor Robert A. Madson

Robert A. Madson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Automated, modular approach to assigning semiconductor lots to tools
    Patent number: 7457681
    Abstract: The operation of a semiconductor fabrication facility may be automated to enable efficient assignments of lots to specific process tools or entities. This may involve the use of an algorithm which may have aspects which are common across various process areas within the fabrication facility. However, the algorithm may be customized to meet the needs of specific process areas.
    Type: Grant
    Filed: March 31, 2006
    Date of Patent: November 25, 2008
    Assignee: Intel Corporation
    Inventors: Murali Krishna, Yi Deng, Aishwarya Varadhan, Joseph J. Concelman, Zachary T. Henkel, Robert A. Madson