Abstract: A method and apparatus for forming multilayer ceramic substrates from large area ceramic green sheets, each having an array of layer sites thereon, by serially aligning each individual layer site with respect to a die cavity and punching the aligned layer site into the die cavity to thereby stack the requisite number of aligned layer sites. Individual layer site alignment ensures that each layer site is aligned with respect to the die cavity so that the dimensional tolerances between layer sites on the large area green sheet are eliminated. Thus, as large a green sheet as is cost effective may be employed, notwithstanding the fact that dimensional distortions on the large area green sheet would preclude alignment of corresponding layer site vias on superimposed large area green sheets.

Abstract: A system for cleaning material from a surface of an object, such as an MLC mask, having movable support member having extended along its length a line of liquid dispensing nozzles and a line of gas dispensing ports for respectively cleaning and drying the surface. The liquid dispensing nozzles and said gas dispensing ports are arranged to respectively provide a continuous line of liquid spray and a continuous line of gas at an angle with respect to the surface so as to form a wedge therewith in the direction of motion of the movable support member. The nozzles and ports are preferably arranged on both sides of the object to simultaneously clean both sides. The support member is moved vertically with respect to the surface by an air cylinder.

Abstract: Vertically displaceable green sheet support fixtures are borne by respective horizontally movable carriages traveling on common rails between respective dual loading stations and a common unloading station, through separate intermediate screening stations, with the carriages movable in opposite directions and out of phase stationwise. The carriages have fixedly coupled thereto, horizontally movable trailers which bear trays of stacked green sheets for selective transfer of the uppermost green sheet to a loading head at the loading station while the carriage borne fixture itself is at a screening station for paste screening of a prior transferred green sheet. Masks employed in screen printing at the screening station are removed from the screening station console and placed in a cleaning chamber for solvent removal of residual screening paste and are air dried prior to return to the screening station console.