Patents by Inventor Robert A. Meyen

Robert A. Meyen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Zero undercut etch process
    Patent number: 5294520
    Abstract: A process in the fabrication of wiring patterns on ceramic or polymeric substrates precisely controls the cross-sectional dimensions of the metallization that constitute the wiring patterns. A single etch process defines thin film conductors on a substrate without loss to the conductor cross-section and provides enhanced thin film design flexibility. The zero undercut etch process uses photoresists defining the metal patterns to completely protect the metal patterns during the subetch.
    Type: Grant
    Filed: August 25, 1992
    Date of Patent: March 15, 1994
    Assignee: International Business Machines Corporation
    Inventors: Thomas A. DeMercurio, Richard J. Hetherington, Robert A. Meyen, Scott A. Sands