Patents by Inventor Robert A. Poltras

Robert A. Poltras has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer holding robot end effecter vertical position determination in ion implanter system
    Patent number: 7675048
    Abstract: A wafer handling robot, ion implanter system including a wafer handling robot and a related method are disclosed. An ion implanter system may include an ion implanting station including a load lock coupled thereto; a wafer handling robot located at least partially within the load lock, the wafer handling robot including an end effecter for handling at least one wafer, and a motor for moving the end effecter vertically; and a sensor positioned within the load lock to determine a vertical position of the end effecter.
    Type: Grant
    Filed: March 6, 2007
    Date of Patent: March 9, 2010
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Brant S. Binns, Kevin Daniels, Robert A. Poltras
  • WAFER HOLDING ROBOT END EFFECTER VERTICAL POSITION DETERMINATION IN ION IMPLANTER SYSTEM
    Publication number: 20080218772
    Abstract: A wafer handling robot, ion implanter system including a wafer handling robot and a related method are disclosed. An ion implanter system may include an ion implanting station including a load lock coupled thereto; a wafer handling robot located at least partially within the load lock, the wafer handling robot including an end effecter for handling at least one wafer, and a motor for moving the end effecter vertically; and a sensor positioned within the load lock to determine a vertical position of the end effecter.
    Type: Application
    Filed: March 6, 2007
    Publication date: September 11, 2008
    Inventors: Brant S. Binns, Kevin Daniels, Robert A. Poltras