Patents by Inventor Robert Alan Soper

Robert Alan Soper has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and system for contiguous proximity correction for semiconductor masks
    Patent number: 7341808
    Abstract: According to one embodiment, a method for patterning a set of features for a semiconductor device includes providing a mask including a substrate and at least one pair of first and second main features disposed on a substrate. The method also includes positioning the mask over a layer of light-sensitive material, and exposing the mask to a light source. The mask also includes at least one sub-resolution feature connecting the first and second main features.
    Type: Grant
    Filed: July 20, 2004
    Date of Patent: March 11, 2008