Patents by Inventor Robert Andrew Poitras

Robert Andrew Poitras has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Mask position detection
    Publication number: 20080073569
    Abstract: A system includes a transfer arm defining a retaining plane, and at least three sensors are disposed on the transfer arm and configured to detect a position of a mask relative to the retaining plane. The at least three sensors may be used to determine if the mask is properly positioned on the transfer arm and to determine if the mask is properly positioned in a masking position. The mask may be used in an ion implanter to shield portions of a workpiece from ion implantation.
    Type: Application
    Filed: September 23, 2006
    Publication date: March 27, 2008
    Applicant: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Charles A. Teodorczyk, James R. McLane, Robert Andrew Poitras