Abstract: An extendible belt conveyor system for a mine. Cars carrying conveyor rollers are part of a main conveyor. When the conveyor needs to be expanded, the individual cars may be extended to extend the framework for the belt. The wheels on the cars may be both elevated and rotated for positioning. A low profile structure may carry a separate conveyor which can fit below the profile of the cars and thus further extend the conveyor. The low profile conveyor can have an elevating head drive mounted thereon which is slidable and can be fixed in a position as the framework is moved forward. This arrangement can be used also in other situations as for dumping refuse in a pile.

Abstract: The invention provides an apparatus and method for performing a process on a substrate. At least two types of structures may be used to provide a flow path for a substrate so that the substrate may be moved from one processing or loading position to another. The first is a conveyor. The second is a track. The flow path may be a closed continuous loop. Each processing island has a valve for introduction and extraction of the substrate into and out of an interior of the island. The processing island may include load locks, and may include in conjunction therewith an inspection station, a CVD chamber, a PECVD chamber, a PVD chamber, a post-anneal chamber, a cleaning chamber, a descumming chamber, an etch chamber, or a combination of such chambers.