Abstract: According to the disclosed embodiments, a repeatable interface in a crystalline material growth system is achieved through an automated heat exchanger alignment apparatus and method. In one embodiment, a furnace chamber including a bottom wall and side walls that define an interior portion is provided. A crucible is disposed in the interior portion of the furnace chamber and configured to contain a crystalline material growth process. Also, a heat exchanger includes an elongated shaft that extends in a vertical direction and traverses the bottom wall of the furnace chamber, whereby a first end portion of the heat exchanger shaft is coupled to the crucible. Furthermore, an automated lifting device is configured to be actuated to adjust a position of the heat exchanger shaft in the vertical direction, whereby a second end portion of the heat exchanger shaft is coupled to the automated lifting device.

Abstract: An apparatus and process for cleaning residual matter, photoresist and other foreign materials off wafers, substrates and semiconductor work pieces including photomasks, compact discs, flat panel displays using megasonic acoustic wave action techniques in conjunction with supercritical fluid cleaning processes, and in particular, for coupling megasonics techniques with supercritical carbon dioxide processing with co-solvents and surfactants, using cycles of soak, rapid decompression and flushing, to improve cleaning capability and to remove submicron particles from the surfaces of wafers.

Abstract: A pressure vessel for use in production processes requiring elevating and ranging of temperatures and pressures during the process cycle, readily adaptable to production line operation, suitable for wafer processing in the semiconductor industry and for other industries and processes. The pressure vessel is configured within an open support frame with a stationary, preferably inverted, orientation. The cover or closing plate is vertically movable towards the mouth of the pressure vessel and functions as the platform by which the object under process is transferred into the vessel. The moving and locking mechanism for the cover is isolated and shielded from the process environment.

Abstract: An inverted pressure vessel system for conducting automated industrial processes requiring elevated pressure and temperatures has a vertically movable pedestal for opening and closing the underside loading port, with pedestal drive system and locking mechanism located below the pedestal top and isolated from the chamber opening. The chamber is connectible to a pressure control and process fluid supply system, and has heat exchangers connected to an external source for temperature control. Process fluids are distributed across a central process cavity through divergent inflow and convergent outflow process fluid channels.

Abstract: A pressure vessel closing system for conducting industrial processes has a pressure vessel with an underside door opening having a major and a minor axis, a cover that is proportionally larger than the door opening, and an external door operating mechanism. The door operating mechanism has door manipulation capabilities for inward movement, rotation, lateral movement, tilting movement, and outward movement of the cover into and out of the pressure vessel through the door opening, for internally closing the door against the inner face of the door opening; the door being then self sealing from the pressure applied within the pressure vessel.

Abstract: An inverted pressure vessel system for conducting automated industrial processes requiring elevated pressure and temperatures has a vertically movable pedestal for opening and closing the underside loading port, with pedestal drive system and locking mechanism located below the pedestal top and isolated from the chamber opening. The chamber is connectible to a pressure control and process fluid supply system, and has heat exchangers connected to an external source for temperature control. Process fluids are distributed across a central process cavity through divergent inflow and convergent outflow process fluid channels.

Abstract: An apparatus and method for drying a microelectronic structure on wafer substrate using supercritical phase gas techniques and a unique pressure vessel locking mechanism. There is lid and a base with an open cavity to contain at least one microelectronic structure on wafer substrate. Clamping the lid to the base uses locking clamp rings with open jaws large to partially enclose the edge of the vessel. The clamp rings are supported symmetrically about the sides of the vessel. The rings are adjusted between an open position where the rings are clear of the vessel and a locking position where the jaws partially enclose the vessel. The jaws and the vessel share a tapered cam plate and roller system configured to bring the rings into vertically compressive locking engagement on the pressure vessel when the rings are moved into locking position. Mechanical interlocks provide security against back pressure opening the rings.

Abstract: The invention is an improved method and apparatus for growing crystals that incorporates an isolation valve between the growth and injection chambers to allow the growth chamber to be maintained at operating temperature and pressure while decoupling the injector chamber in order to make changes necessary to restart or advance the process. Separate heating elements in the injector assembly or chamber provide related heating control. Upper and lower load cells and programmable signal amplifiers are configured to weigh and output the dynamic weight range of the loss or gain of process materials of the growth chamber crucible and the injector assembly, and are connected by electrical slip rings or wireless means to a computer control system.

Abstract: A valving arrangement primarily designed and intended for use in a negative pressure ventilator system. The valve arrangement has a uniquely designed valve that enables the ventilator to perform a number of operations simply by manipulation of a single, one-piece valve member within a valve housing. The valve housing has multiple inlets and outlets and the valve member can be rotated within it to present a variety of pressure cycles to the patient. In the preferred manner of operation, the present invention selectively applies negative and positive pressures to the patient during different portions of the cycle. In this regard, the valve member is structured so that negative and positive pressures are never at the same time delivered to the patient. The valve arrangement is compact and lightweight. It is also functionally superior to prior designs that can only supply whatever pressure is being created by the blower.

Abstract: A portable positive displacement respirator/ventilator is provided for both a pressure sigh and a volume sigh of predetermined duration and frequency by providing a variable length crank arm connecting a piston through a connecting rod by mounting the connecting rod on a circular toothed gear, pivoting the gear for movement at its center and driven on its outer edge with a separate motor driven pivot gear which when moved relocates the effective length of movement of the point of attachment of the connecting rod thereby changing the volume swept by the piston for the same arc of reciprocal movement of the larger circular toothed gear enabling both a volume change or a volume sigh with the device. A cooperating multiplicity of adjustable pressure regulating valves where at least one can be intermittently closed during the operation of the device regulates ventilation pressure or breathing pressure and sigh pressure.