Patents by Inventor Robert B. Lowrance
Robert B. Lowrance has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7503448Abstract: A break-away mounting system for a continuous-motion, high-speed position conveyor system is disclosed. A support cradle may be suspended from a conveyor belt such that the support cradle maintains a fixed position and orientation relative to at least one point on the conveyor belt without inducing appreciable stress on the conveyor belt, the support cradle, or the coupling between the conveyor belt and the support cradle. The mount may include a leading rotatable bearing attached to the support cradle which may releasably engage a first key attached to the conveyor belt, the rotatable bearing adapted to accommodate rotational forces applied to the support cradle by the conveyor belt. The mount may also include a slide bearing attached to the support cradle which may releasably engage a second key attached to the conveyor belt, the slide bearing adapted to accommodate longitudinal forces applied to the support cradle by the conveyor belt.Type: GrantFiled: October 31, 2006Date of Patent: March 17, 2009Assignee: Applied Materials, Inc.Inventors: Michael R. Rice, Eric A. Englhardt, Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens
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Publication number: 20090030547Abstract: In one aspect, a system is disclosed having a substrate carrier loader adapted to load substrate carriers onto a moving conveyor; and a controller coupled to the substrate carrier loader, the controller adapted to assist in at least one of alignment of the substrate carrier loader to the moving conveyor and calibration of the substrate carrier loader to the moving conveyor or a storage location. Numerous other aspects are provided.Type: ApplicationFiled: October 4, 2008Publication date: January 29, 2009Inventors: Michael R. Rice, Eric A. Englhardt, Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens, Kirk Van Katwyk, Amit Puri
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Publication number: 20080289932Abstract: In a semiconductor fabrication facility, a conveyor transports substrate carriers. The substrate carriers are unloaded from the conveyor and loaded onto the conveyor without stopping the conveyor. A load and/or unload mechanism lifts the substrate carriers from the conveyor during unloading operations, while matching the horizontal speed of the conveyor. Similarly, during loading operations, the load/unload mechanism lowers a substrate carrier into engagement with the conveyor while matching the horizontal speed of the conveyor. Individual substrates, without carriers, may be similarly loaded and/or unloaded from a conveyor.Type: ApplicationFiled: August 14, 2007Publication date: November 27, 2008Inventors: Michael Robert Rice, Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens, Eric A. Englhardt
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Patent number: 7455172Abstract: A break-away mounting system for a continuous-motion, high-speed position conveyor system is disclosed. A support cradle may be suspended from a conveyor belt such that the support cradle maintains a fixed position and orientation relative to at least one point on the conveyor belt without inducing appreciable stress on the conveyor belt, the support cradle, or the coupling between the conveyor belt and the support cradle. The mount may include a leading rotatable bearing attached to the support cradle which may releasably engage a first key attached to the conveyor belt, the rotatable bearing adapted to accommodate rotational forces applied to the support cradle by the conveyor belt. The mount may also include a slide bearing attached to the support cradle which may releasably engage a second key attached to the conveyor belt, the slide bearing adapted to accommodate longitudinal forces applied to the support cradle by the conveyor belt.Type: GrantFiled: July 28, 2006Date of Patent: November 25, 2008Assignee: Applied Materials, Inc.Inventors: Michael R. Rice, Eric A. Englhardt, Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens
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Patent number: 7433756Abstract: In a first aspect, a first method of calibrating a substrate carrier loader to a moving conveyor is provided. The first method includes the steps of (1) providing a substrate carrier loader adapted to load substrate carriers onto a moving conveyor; (2) aligning the substrate carrier loader to the moving conveyor; and (3) calibrating the substrate carrier loader to the moving conveyor. Numerous other aspects are provided.Type: GrantFiled: November 12, 2004Date of Patent: October 7, 2008Assignee: Applied Materials, Inc.Inventors: Michael R. Rice, Eric A. Englhardt, Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens, Kirk Van Katwyk, Amit Puri
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Publication number: 20080187414Abstract: In one aspect, a substrate loading station for a processing tool includes plural load ports. Each load port is operatively coupled to the processing tool and has a mechanism for opening a substrate carrier. A carrier handler transports substrate carriers from a factory exchange location to the load ports without placing the carriers on any carrier support location other than the load ports. Numerous other aspects are provided.Type: ApplicationFiled: April 9, 2008Publication date: August 7, 2008Applicant: APPLIED MATERIALS, INC.Inventors: Martin R. Elliott, Michael R. Rice, Robert B. Lowrance, Jeffrey C. Hudgens, Eric A. Englhardt
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Publication number: 20080187419Abstract: In a first aspect, a first method of calibrating a substrate carrier loader to a moving conveyor is provided. The first method includes the steps of (1) providing a substrate carrier loader adapted to load substrate carriers onto a moving conveyor; (2) aligning the substrate carrier loader to the moving conveyor; and (3) calibrating the substrate carrier loader to the moving conveyor. Numerous other aspects are provided.Type: ApplicationFiled: April 8, 2008Publication date: August 7, 2008Inventors: Michael R. Rice, Eric A. Englhardt, Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens, Kirk Van Katwyk, Amit Puri
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Patent number: 7367446Abstract: According to a first aspect, a first conveyor system is provided that is adapted to deliver substrate carriers within a semiconductor device manufacturing facility. The first conveyor system includes a ribbon that forms a closed loop along at least a portion of the semiconductor device manufacturing facility. The ribbon is adapted to (1) be flexible in a horizontal plane and rigid in a vertical plane; and (2) transport a plurality of substrate carriers within at least a portion of the semiconductor device manufacturing facility. Numerous other aspects are provided, as are systems, methods and computer program products in accordance with these and other aspects.Type: GrantFiled: October 31, 2006Date of Patent: May 6, 2008Assignee: Applied Materials, Inc.Inventors: Michael R. Rice, Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens, Eric A. Englhardt
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Patent number: 7359767Abstract: In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station operates to exchange substrate carriers with the conveyor while the conveyor is in motion. A carrier exchange procedure may include moving an end effector of the substrate carrier handler at a velocity that substantially matches a velocity of the conveyor. Numerous other aspects are provided.Type: GrantFiled: July 18, 2006Date of Patent: April 15, 2008Assignee: Applied Materials, Inc.Inventors: Michael Robert Rice, Martin R. Elliott, Robert B. Lowrance, Jeffrey C. Hudgens, Eric Andrew Englhardt
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Patent number: 7346431Abstract: In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station operates to exchange substrate carriers with the conveyor while the conveyor is in motion. A carrier exchange procedure may include moving an end effector of the substrate carrier handler at a velocity that substantially matches a velocity of the conveyor. Numerous other aspects are provided.Type: GrantFiled: October 31, 2006Date of Patent: March 18, 2008Assignee: Applied Materials, Inc.Inventors: Michael Robert Rice, Martin R. Elliott, Robert B. Lowrance, Jeffrey C. Hudgens, Eric Andrew Englhardt
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Patent number: 7299831Abstract: In a first aspect, an automatic door opener is provided that includes (1) a platform adapted to support a substrate carrier; (2) a door opening mechanism adapted to open a door of the substrate carrier while the substrate carrier is supported by the platform; and (3) a tunnel. The tunnel is adapted to extend from an opening in a clean room wall toward the platform and at least partially surround the platform. The tunnel is further adapted to direct a flow of air from the clean room wall toward the platform and out of the tunnel. Numerous other aspects are provided.Type: GrantFiled: August 23, 2005Date of Patent: November 27, 2007Assignee: Applied Materials, Inc.Inventors: Martin R. Elliott, Michael R. Rice, Robert B. Lowrance, Jeffrey C. Hudgens, Eric A. Englhardt
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Patent number: 7293642Abstract: According to a first aspect, a first conveyor system is provided that is adapted to deliver substrate carriers within a semiconductor device manufacturing facility. The first conveyor system includes a ribbon that forms a closed loop along at least a portion of the semiconductor device manufacturing facility. The ribbon is adapted to (1) be flexible in a horizontal plane and rigid in a vertical plane; and (2) transport a plurality of substrate carriers within at least a portion of the semiconductor device manufacturing facility. Numerous other aspects are provided, as are systems, methods and computer program products in accordance with these and other aspects.Type: GrantFiled: June 27, 2006Date of Patent: November 13, 2007Assignee: Applied Materials, Inc.Inventors: Michael R. Rice, Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens, Eric A. Englhardt
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Patent number: 7258520Abstract: A system for opening a substrate carrier includes a substrate carrier having an openable portion. The substrate carrier also has an opening mechanism coupled to the openable portion. A substrate transfer location has a support adapted to support a substrate carrier. The substrate transfer location also has an actuator mechanism. The actuator mechanism is positioned relative to the support so as to interact with the opening mechanism of the substrate carrier. The actuator mechanism of the substrate transfer location and the opening mechanism of the substrate carrier are adapted to interface with each other at the substrate transfer location so as to employ movement of the substrate carrier to achieve opening and closing of the substrate carrier.Type: GrantFiled: August 28, 2003Date of Patent: August 21, 2007Assignee: Applied Materials, Inc.Inventors: Martin R. Elliott, Michael Robert Rice, Robert B. Lowrance, Jeffrey C. Hudgens, Eric Andrew Englhardt, Loy Randall Stuart
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Patent number: 7243003Abstract: In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station operates to exchange substrate carriers with the conveyor while the conveyor is in motion. A carrier exchange procedure may include moving an end effector of the substrate carrier handler at a velocity that substantially matches a velocity of the conveyor. Numerous other aspects are provided.Type: GrantFiled: August 28, 2003Date of Patent: July 10, 2007Assignee: Applied Materials, Inc.Inventors: Michael Robert Rice, Martin R. Elliott, Robert B. Lowrance, Jeffrey C. Hudgens, Eric Andrew Englhardt
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Patent number: 7234584Abstract: In a semiconductor fabrication facility, a conveyor transports substrate carriers. The substrate carriers are unloaded from the conveyor and loaded onto the conveyor without stopping the conveyor. A load and/or unload mechanism lifts the substrate carriers from the conveyor during unloading operations, while matching the horizontal speed of the conveyor. Similarly, during loading operations, the load/unload mechanism lowers a substrate carrier into engagement with the conveyor while matching the horizontal speed of the conveyor. Individual substrates, without carriers, may be similarly loaded and/or unloaded from a conveyor.Type: GrantFiled: August 28, 2003Date of Patent: June 26, 2007Assignee: Applied Materials, Inc.Inventors: Michael Robert Rice, Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens, Eric A. Englhardt
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Patent number: 7230702Abstract: A movable portion of a substrate carrier handler is extended into a transport path along which a substrate carrier transport system transports a substrate carrier, respective kinematic coupling events are detected between corresponding interface elements of the movable portion and the substrate carrier, respective signals are generated in response thereto, and an alignment offset between the substrate carrier and the substrate carrier transport system is determined based on the signals. A movable portion matches an elevation, position, and/or a speed/velocity of a substrate carrier moving along the transport path. Sensors for detecting kinematic coupling and generating signals in response thereto are provided on the movable portion. An end effector includes a support with interface elements and sensors for detecting kinematic coupling and generating respective signals.Type: GrantFiled: November 12, 2004Date of Patent: June 12, 2007Assignee: Applied Materials, Inc.Inventors: Michael R. Rice, Eric A. Englhardt, Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens, Kirk Van Katwyk, Amitabh Puri
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Patent number: 7221993Abstract: In a first aspect, a method of managing work in progress within a small lot size semiconductor device manufacturing facility is provided. The first method includes providing a small lot size semiconductor device manufacturing facility having (1) a plurality of processing tools; and (2) a high speed transport system adapted to transport small lot size substrate carriers among the processing tools. The method further includes maintaining a predetermined work in progress level within the small lot size semiconductor device manufacturing facility by (1) increasing an average cycle time of low priority substrates within the small lot size semiconductor device manufacturing facility; and (2) decreasing an average cycle time of high priority substrates within the small lot size semiconductor device manufacturing facility so as to approximately maintain the predetermined work in progress level within the small lot size semiconductor device manufacturing facility. Numerous other aspects are provided.Type: GrantFiled: January 26, 2004Date of Patent: May 22, 2007Assignee: Applied Materials, Inc.Inventors: Michael R. Rice, Eric A. Englhardt, Vinay Shah, Martin R. Elliott, Robert B. Lowrance, Jeffrey C. Hudgens
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Patent number: 7168553Abstract: In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station operates to exchange substrate carriers with the conveyor while the conveyor is in motion. A carrier exchange procedure may include moving an end effector of the substrate carrier handler at a velocity that substantially matches a velocity of the conveyor. A balancing mass is coupled directly or indirectly to a frame on which the substrate carrier handler is mounted and is adapted to accelerate in a direction opposite to the direction of end effector acceleration, as the end effector accelerates. Thus, inertial loads may be substantially balanced, and frame vibration reduced, despite potentially high rates of acceleration. Numerous other aspects are provided.Type: GrantFiled: November 12, 2004Date of Patent: January 30, 2007Assignee: Applied Materials, Inc.Inventors: Michael R. Rice, Eric A. Englhardt, Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens
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Patent number: 7156221Abstract: A break-away mounting system for a continuous-motion, high-speed position conveyor system is disclosed. A support cradle may be suspended from a conveyor belt such that the support cradle maintains a fixed position and orientation relative to at least one point on the conveyor belt without inducing appreciable stress on the conveyor belt, the support cradle, or the coupling between the conveyor belt and the support cradle. The mount may include a leading rotatable bearing attached to the support cradle which may releasably engage a first key attached to the conveyor belt, the rotatable bearing adapted to accommodate rotational forces applied to the support cradle by the conveyor belt. The mount may also include a slide bearing attached to the support cradle which may releasably engage a second key attached to the conveyor belt, the slide bearing adapted to accommodate longitudinal forces applied to the support cradle by the conveyor belt.Type: GrantFiled: November 12, 2004Date of Patent: January 2, 2007Assignee: Applied Materials, Inc.Inventors: Michael R. Rice, Eric A. Englhardt, Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens
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Patent number: 7077264Abstract: According to a first aspect, a first conveyor system is provided that is adapted to deliver substrate carriers within a semiconductor device manufacturing facility. The first conveyor system includes a ribbon that forms a closed loop along at least a portion of the semiconductor device manufacturing facility. The ribbon is adapted to (1) be flexible in a horizontal plane and rigid in a vertical plane; and (2) transport a plurality of substrate carriers within at least a portion of the semiconductor device manufacturing facility. Numerous other aspects are provided, as are systems, methods and computer program products in accordance with these and other aspects.Type: GrantFiled: January 26, 2004Date of Patent: July 18, 2006Assignee: Applied Material, Inc.Inventors: Michael R. Rice, Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens, Eric A. Englhardt