Patents by Inventor Robert B. MacNaughton

Robert B. MacNaughton has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for forming an aluminum metal contact
    Patent number: 5374592
    Abstract: A method is provided for depositing aluminum thin film layers so as to form an improved metal contact in a semiconductor integrated circuit device. An initial layer of aluminum is deposited at a very low temperature, such as room temperature, to a depth sufficient to form a continuous layer. A second aluminum layer is then deposited at increasing temperatures and lower deposition rates in order to complete the deposition of the layer.
    Type: Grant
    Filed: February 7, 1994
    Date of Patent: December 20, 1994
    Assignee: SGS-Thomson Microelectronics, Inc.
    Inventors: Robert B. MacNaughton, De-Dui Liao