Abstract: A mirror includes a carrier, a reflecting layer disposed above a main face of the carrier, and a transparent layer disposed above the reflective layer. The carrier includes a base body, and the base body includes one or more of a material comprising a density in a range from 0.1 to 1.0 g/cm3, a porous material, a foamed material, a material comprising a structure containing closed cells, a material comprising a honeycomb structure, or a structure containing carbon fibers.

Abstract: A mirror includes a carrier, a reflecting layer disposed above a main face of the carrier, and a transparent layer disposed above the reflective layer. The carrier includes a base body, and the base body includes one or more of a material comprising a density in a range from 0.1 to 1.0 g/cm3, a porous material, a foamed material, a material comprising a structure containing closed cells, a material comprising a honeycomb structure, or a structure containing carbon fibers.

Abstract: Systems, assemblies and methods for thermally managing a grazing incidence collector (GIC) for EUV lithography applications are disclosed. The GIC thermal management assembly includes a GIC mirror shell interfaced with a jacket to form a sealed chamber. An open cell, heat transfer (OCHT) material is disposed within the metal chamber and is thermally and mechanically bonded with the GIC mirror shell and jacket. A coolant is flowed in an azimuthally symmetric fashion through the OCHT material between input and output plenums to effectuate cooling when the GIC thermal management assembly is used in a GIC mirror system configured to receive and form collected EUV radiation from an EUV radiation source.

Abstract: Systems, assemblies and methods for thermally managing a grazing incidence collector (GIC) for EUV lithography applications are disclosed. The GIC thermal management assembly includes a GIC mirror shell interfaced with a jacket to form a sealed chamber. An open cell, heat transfer (OCHT) material is disposed within the metal chamber and is thermally and mechanically bonded with the GIC mirror shell and jacket. A coolant is flowed in an azimuthally symmetric fashion through the OCHT material between input and output plenums to effectuate cooling when the GIC thermal management assembly is used in a GIC mirror system configured to receive and form collected EUV radiation from an EUV radiation source.

Abstract: A process for fabricating a reflective optical system is disclosed that includes providing first and second mandrels that form a mandrel assembly, and positioning the mandrel assembly in an electroforming bath. The process also includes performing an electroforming operation for a predetermined period, thereby forming an optical system on the mandrel assembly. The process further involves separating the mandrel assembly from the optical system. The resulting optical system is reflective and has at least first and second elongate hollow sections each having an axis corresponding to the axis of elongation of a respective mandrel. The reflective optical system may be used as an afocal relay and used in lithography applications.

Abstract: A process for fabricating a reflective optical system, comprising: (a) providing at least a first mandrel and a second mandrel, each mandrel having an axis of elongation and having at one end thereof a negative end surface defining in negative shape a reflective surface, (c) rigidly and releasably attaching the first mandrel and the second mandrel to each other, thereby forming a mandrel assembly; (d) positioning the mandrel assembly in an electroforming bath and performing an electroforming operation for a predetermined period, thereby forming an optical system on the mandrel assembly; and (e) separating the mandrel assembly from the optical system, the optical system thereby having at least first and second elongate hollow sections, wherein each hollow section has an axis corresponding to the axis of elongation of a respective mandrel, wherein each hollow section has a first end, at which a reflective surface corresponding to the negative end surface of a respective mandrel is disposed, and a second end, th

Abstract: A process for the fabrication of a metallic component, such as those used in energy generation and heat transfer systems (e.g., reactor vessels, combustion chambers), in propulsion systems (e.g., rocket engines), and communications (e.g., optical telescopes). The process comprises: providing an object (e.g. a shaped mandrel) having surface; performing a first electroforming operation, thereby forming a first metallic layer comprising a metallic material (e.g. nickel, copper) on said surface; forming a first mask layer on the first metallic layer, the first mask layer comprising a non-conductive material (e.g.