Patents by Inventor Robert Beikler

Robert Beikler has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • High precision VPD-DC scan
    Patent number: 12379327
    Abstract: The invention relates to a method and system for performing VPD-DC on wafer surfaces, wherein the pipette substitutes for the function of the scan tube and is operated such that a bulge of scanning liquid protrudes from the pipette channel and contacts the wafer surface for scanning.
    Type: Grant
    Filed: September 9, 2022
    Date of Patent: August 5, 2025
    Assignee: PVA TEPLA AG
    Inventors: Robert Beikler, William Mande, Walter Boehme
  • HIGH PRECISION VPD-DC SCAN
    Publication number: 20230118379
    Abstract: The invention relates to a method and system for performing VPD-DC on wafer surfaces, wherein the pipette substitutes for the function of the scan tube and is operated such that a bulge of scanning liquid protrudes from the pipette channel and contacts the wafer surface for scanning.
    Type: Application
    Filed: September 9, 2022
    Publication date: April 20, 2023
    Applicant: PVA TePla AG
    Inventors: Robert BEIKLER, William MANDE, Walter BOEHME
  • Sample container for receiving small-volume liquid samples
    Patent number: 10618048
    Abstract: The present invention relates to a sample container for receiving small-volume liquid samples, preferably samples obtained by vapor phase decomposition, wherein the container has an upwardly open receiving region. In accordance with the invention, the receiving region has an outflow opening at its lowest point that is reversibly closed in a liquid-tight manner by an actuator having a closure surface.
    Type: Grant
    Filed: December 4, 2017
    Date of Patent: April 14, 2020
    Assignee: PVA TePla AG
    Inventor: Robert Beikler
  • SAMPLE CONTAINER FOR RECEIVING SMALL-VOLUME LIQUID SAMPLES
    Publication number: 20180154352
    Abstract: The present invention relates to a sample container for receiving small-volume liquid samples, preferably samples obtained by vapor phase decomposition, wherein the container has an upwardly open receiving region. In accordance with the invention, the receiving region has an outflow opening at its lowest point that is reversibly closed in a liquid-tight manner by an actuator having a closure surface.
    Type: Application
    Filed: December 4, 2017
    Publication date: June 7, 2018
    Inventor: Robert Beikler