Patents by Inventor Robert Benassi

Robert Benassi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Devices and methods for measuring wafer characteristics during semiconductor wafer polishing
    Publication number: 20070235133
    Abstract: A system and method of measuring a change in thickness of a layer of material disposed on a wafer while polishing the layer. Light is directed at the surface of the wafer from an indwelling optical sensor disposed within a polishing pad and data signals are wireless transmitted to a control system.
    Type: Application
    Filed: March 29, 2006
    Publication date: October 11, 2007
    Inventor: Robert Benassi