Patents by Inventor Robert Bendler

Robert Bendler has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Particle monitor system and method
    Patent number: 5083865
    Abstract: A particle monitor for a processing chamber exhaust line is disclosed which incorporates exhaust line heating, purge gas flow over surfaces such as optical windows in the exhaust gas line, and a thermally and electrically insulating particle monitor mounting arrangement. The features collectively protect the particle monitor from electrical disturbance and from the heated inlet and maintain the optical surfaces clean and free of depositions from the exhaust gas flow for an extended period. The arrangement also suppresses etching of the optical surfaces.
    Type: Grant
    Filed: May 11, 1990
    Date of Patent: January 28, 1992
    Assignee: Applied Materials, Inc.
    Inventors: Patrick Kinney, Boris Fishkin, Jun Zhao, Anand Gupta, Robert Bendler