Patents by Inventor Robert Berglund

Robert Berglund has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Controlled isotropy reactive ion etcher for multi-stepped sloped contact etch process
    Patent number: 5250165
    Abstract: A multi-tiered contact etch process comprising alternating anisotropic and isotropic etch steps is performed in a reactive ion etcher wherein DC bias on a cathode (11) of the etcher can be controlled independently from RF power, adding a great deal of control over isotropy of the etching. By shunting the cathode (11) directly to ground a high level of isotropy is achieved during isotropic etch steps. When the cathode (11) is not shunted to ground a bias voltage develops on the cathode (11) providing a highly anisotropic etching.
    Type: Grant
    Filed: December 9, 1991
    Date of Patent: October 5, 1993
    Assignee: Motorola, Inc.
    Inventors: Robert Berglund, Karl Mautz, Jonathan C. Dahm