Patents by Inventor Robert Berner

Robert Berner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plating apparatus and method
    Publication number: 20050230260
    Abstract: The present invention comprises a metal plating apparatus and method, particularly suitable for autocatalytic (i.e., electroless) plating, comprising a pressurized sealable vessel for disposing a substrate to be plated and for the circulation of plating solutions wherein temperatures and pressure are highly controllable.
    Type: Application
    Filed: February 4, 2005
    Publication date: October 20, 2005
    Applicant: Surfect Technologies, Inc.
    Inventors: Martin Bleck, Robert Berner, Gerard Minogue, Fernando Sanchez, Mathew Hannon, Thomas Griego
  • Modular semiconductor workpiece processing tool
    Publication number: 20050193537
    Abstract: The present invention provides for a semiconductor workpiece processing tool and methods for handling semiconductor workpiece therein. The semiconductor workpiece processing tool preferably includes an interface section comprising at least one interface module and a processing section comprising a plurality of processing modules for processing the semiconductor workpieces. The semiconductor workpiece processing tool may have a conveyor for transferring the semiconductor workpieces between the interface modules and the processing modules.
    Type: Application
    Filed: April 7, 2005
    Publication date: September 8, 2005
    Inventors: Robert Berner, Daniel Woodruff, Wayne Schmidt, Kevin Coyle, Vladimir Zila, Worm Lund