Patents by Inventor Robert Brian Huff

Robert Brian Huff has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Arc recovery without over-voltage for plasma chamber power supplies using a shunt switch
    Patent number: 8217299
    Abstract: A system and method for over-voltage protection is described. In one embodiment of the invention, an apparatus includes an output port configured to deliver power to a plasma chamber to ignite a plasma. The apparatus also includes a shunt switch in parallel with the output port and a processor configured to receive an indicator of an arc in the plasma. The processor is configured to close the shunt switch for a period of time to divert current away from the arc. The processor is also configured to trigger a pulse of the shunt switch to limit a voltage of an increasing voltage condition associated with the arc.
    Type: Grant
    Filed: February 22, 2007
    Date of Patent: July 10, 2012
    Assignee: Advanced Energy Industries, Inc.
    Inventors: Milan Ilic, Vladislav V. Shilo, Robert Brian Huff
  • ARC RECOVERY WITHOUT OVER-VOLTAGE FOR PLASMA CHAMBER POWER SUPPLIES USING A SHUNT SWITCH
    Publication number: 20080203070
    Abstract: A system and method for over-voltage protection is described. In one embodiment of the invention, an apparatus includes an output port configured to deliver power to a plasma chamber to ignite a plasma. The apparatus also includes a shunt switch in parallel with the output port and a processor configured to receive an indicator of an arc in the plasma. The processor is configured to close the shunt switch for a period of time to divert current away from the arc. The processor is also configured to trigger a pulse of the shunt switch to limit a voltage of an increasing voltage condition associated with the arc.
    Type: Application
    Filed: February 22, 2007
    Publication date: August 28, 2008
    Inventors: Milan Ilic, Vladislav V. Shilo, Robert Brian Huff