Patents by Inventor Robert C. Amme

Robert C. Amme has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Photon-enhanced neutral beam etcher and cleaner
    Patent number: 5897844
    Abstract: An apparatus for processing substrates, the apparatus including a plurality of molecular dissociation furnaces. Each dissociation furnace produces a directed beam of neutral dissociated reactive species. Each reactive beam is directed at a surface of the semiconductor substrate. A photon source is also directed at the surface of the semiconductor substrate. The intensity and wavelength of the photon source are selected to enhance the reaction rate over that of the reactive beam acting alone on the surface.
    Type: Grant
    Filed: May 22, 1997
    Date of Patent: April 27, 1999
    Assignee: Colorado Seminary
    Inventors: Robert C. Amme, Bert Van Zyl
  • Processing substrates with a photon-enhanced neutral beam
    Patent number: 5637188
    Abstract: An apparatus for processing substrates, the apparatus including a plurality of molecular dissociation furnaces. Each dissociation furnace produces a directed beam of neutral dissociated reactive species. Each reactive beam is directed at a surface of the semiconductor substrate. A photon source is also directed at the surface of the semiconductor substrate. The intensity and wavelength of the photon source are selected to enhance the reaction rate over that of the reactive beam acting alone on the surface.
    Type: Grant
    Filed: February 17, 1995
    Date of Patent: June 10, 1997
    Assignee: Colorado Seminary
    Inventors: Robert C. Amme, Bert Van Zyl