Patents by Inventor Robert C. Bausmith

Robert C. Bausmith has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Etching metal films with complexing chloride plasma
    Patent number: 4919750
    Abstract: A method for dry etching metals that form low volatility chlordes, in which Z-Cl reaction products are controllably introduced into a conventional Cl-based plasma independent of the workpiece. The Z-Cl products (e.g., AlCl.sub.3, GaCl.sub.3, etc.) are metal chlorides that have both electron acceptor and chloride donor properties. Thus, metals M (e.g., cobalt, copper and nickel) that usually produce low volatility chlorides can be controllably complexed to form high volatility Z.sub.x Cl.sub.y M.sub.z reaction products.
    Type: Grant
    Filed: April 24, 1989
    Date of Patent: April 24, 1990
    Assignee: International Business Machines Corporation
    Inventors: Robert C. Bausmith, William J. Cote, John E. Cronin, Karey L. Holland, Carter W. Kaanta, Pei-Ing P. Lee, Terrance M. Wright
  • Tailoring of via-hole sidewall slope
    Patent number: 4624740
    Abstract: A method of selectively tailoring the slope of via hole sidewalls. A first polyimide layer (in which the vias are to be formed) is covered by a strippable layer, and the two layers are isotropically etched. By varying the thickness of the strippable layer with respect to that of the polyimide layer, the slope of the via hole sidewalls can be controlled.
    Type: Grant
    Filed: January 22, 1985
    Date of Patent: November 25, 1986
    Assignee: International Business Machines Corporation
    Inventors: Allan D. Abrams, Robert C. Bausmith, Karey L. Holland, Steven P. Holland