Patents by Inventor Robert C. May
Robert C. May has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20250087514Abstract: A substrate transport apparatus includes a pair of dual arms having first dual arms and second dual arms; and a drive section. The drive section has a motor, that describes a motion with a predetermined stroke that raises and lowers a corresponding end effector of the first dual arms so that at least a first top end effector and a first bottom end effector each place and pick a substrate from each level of a triple stack load lock with the predetermined stroke of substantially 175 mm. A first bottom arm and a first top arm, of the first dual arms, are arranged so that a bottom-most link of the first dual arms is located within a height from substantially 120.5 mm below the substantially level substrate transport plane corresponding to a bottom-most end effector of the first dual arms.Type: ApplicationFiled: September 6, 2024Publication date: March 13, 2025Inventors: Robert T. Caveney, Robert C. May, Jairo T. Moura, Matthew J. McLellan, Ulysses Gilchrist, Alexander G. Krupyshev
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Publication number: 20250088075Abstract: A brushless electrical machine includes: a frame; an electric machine stator connected to the frame and having a phase coil disposed in an atmospheric volume holding an atmospheric environment; an electric machine rotor cooperatively coupled to the electric machine stator so as to generate an output under stimulation from the electric machine stator, the electric machine rotor being disposed in a sealed environment sealed from and different than the atmospheric volume; and a seal that seals the electric machine rotor from the electric machine stator. The electric machine rotor and electric machine stator are disposed in an axial gap arrangement with an axial gap between the electric machine rotor and electric machine stator disposed astride the electric machine stator, and the seal is arranged in the axial gap so as to seal each electric machine stator from each electric machine rotor stimulated by the electric machine stator across the seal.Type: ApplicationFiled: September 6, 2024Publication date: March 13, 2025Inventors: Robert T. Caveney, Robert C. May, Jairo T. Moura, Matthew J. McLellan, Ulysses Gilchrist, Alexander G. Krupyshev
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Patent number: 12206342Abstract: A linear electrical machine including a frame with a level reference plane, an array of electromagnets connected to the frame and coupled to an alternating current power source energizing each electromagnet, at least one reaction platen of paramagnetic, diamagnetic, or non-magnetic conductive material disposed to cooperate with the electromagnets of the array of electromagnets so that excitation of the electromagnets with alternating current generates levitation and propulsion forces against the reaction platen that controllably levitate and propel the reaction platen along at least one drive line, in a controlled attitude relative to the drive plane, and a controller operably coupled to the array of electromagnets and the alternating current power source and configured so as to sequentially excite the electromagnets with multiphase alternating current with a predetermined excitation characteristic so that each reaction platen is levitated and propelled with up to six degrees of freedom.Type: GrantFiled: October 27, 2022Date of Patent: January 21, 2025Assignee: Brooks Automation US, LLCInventors: Jairo T. Moura, Vincent Tsang, Karanjit Saini, Robert T. Caveney, Robert C. May, Daniel Babbs
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Patent number: 12162698Abstract: A substrate transport apparatus comprising a frame, a drive section connected to the frame, and an articulated arm having at least one articulated arm link operably connected to the drive section so that the articulated arm rotates about a pivot axis relative to the frame and extends and retracts relative to the pivot axis. The articulated arm has an end effector pivotally mounted to at least one articulated arm link forming a joint between the end effector and the articulated arm link, with an arm joint pivot axis disposed so that the end effector rotates relative to at least one articulated arm link about the arm joint pivot axis. The articulated arm has a drive band transmission with drive and driven pulleys where the driven pulley is connected to the articulated wrist.Type: GrantFiled: February 1, 2022Date of Patent: December 10, 2024Assignee: Brooks Automation US, LLCInventors: Daniel Babbs, Vincent W. Tsang, Robert C. May
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Patent number: 11978648Abstract: A substrate transport system includes a carrier having a housing forming an interior environment having an opening for holding at least one substrate and a door for sealing the opening from an outside atmosphere where when sealed the interior environment is configured to maintain an interior atmosphere therein, the housing including a fluid reservoir exterior to the interior environment and configured to contain a fluid, forming a different atmosphere in the fluid reservoir than the interior atmosphere, to form a fluidic barrier seal that seals the interior environment from an environment exterior to the carrier.Type: GrantFiled: May 23, 2023Date of Patent: May 7, 2024Assignee: Brooks Automation US, LLCInventors: Daniel Babbs, Robert T Caveney, Robert C May, Krzysztof A Majczak
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Patent number: 11658051Abstract: A substrate transport system includes a carrier having a housing forming an interior environment having an opening for holding at least one substrate and a door for sealing the opening from an outside atmosphere where when sealed the interior environment is configured to maintain an interior atmosphere therein, the housing including a fluid reservoir exterior to the interior environment and configured to contain a fluid, forming a different atmosphere in the fluid reservoir than the interior atmosphere, to form a fluidic barrier seal that seals the interior environment from an environment exterior to the carrier.Type: GrantFiled: September 14, 2021Date of Patent: May 23, 2023Assignee: Brooks Automation US, LLCInventors: Daniel Babbs, Robert T Caveney, Robert C May, Krzysztof A Majczak
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Publication number: 20230143307Abstract: A linear electrical machine including a frame with a level reference plane, an array of electromagnets connected to the frame and coupled to an alternating current power source energizing each electromagnet, at least one reaction platen of paramagnetic, diamagnetic, or non-magnetic conductive material disposed to cooperate with the electromagnets of the array of electromagnets so that excitation of the electromagnets with alternating current generates levitation and propulsion forces against the reaction platen that controllably levitate and propel the reaction platen along at least one drive line, in a controlled attitude relative to the drive plane, and a controller operably coupled to the array of electromagnets and the alternating current power source and configured so as to sequentially excite the electromagnets with multiphase alternating current with a predetermined excitation characteristic so that each reaction platen is levitated and propelled with up to six degrees of freedom.Type: ApplicationFiled: October 27, 2022Publication date: May 11, 2023Inventors: Jairo T. Moura, Vincent Tsang, Karanjit Saini, Robert T. Caveney, Robert C. May, Daniel Babbs
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Patent number: 11235935Abstract: A substrate transport apparatus comprising a frame, a drive section connected to the frame, and an articulated arm having at least one articulated arm link operably connected to the drive section so that the articulated arm rotates about a pivot axis relative to the frame and extends and retracts relative to the pivot axis. The articulated arm has an end effector pivotally mounted to at least one articulated arm link forming a joint between the end effector and the articulated arm link, with an arm joint pivot axis disposed so that the end effector rotates relative to at least one articulated arm link about the arm joint pivot axis. The articulated arm has a drive band transmission with drive and driven pulleys where the driven pulley is connected to the articulated wrist.Type: GrantFiled: January 22, 2021Date of Patent: February 1, 2022Assignee: Brooks Automation, Inc.Inventors: Daniel Babbs, Vincent W. Tsang, Robert C. May
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Publication number: 20210407836Abstract: A substrate transport system includes a carrier having a housing forming an interior environment having an opening for holding at least one substrate and a door for sealing the opening from an outside atmosphere where when sealed the interior environment is configured to maintain an interior atmosphere therein, the housing including a fluid reservoir exterior to the interior environment and configured to contain a fluid, forming a different atmosphere in the fluid reservoir than the interior atmosphere, to form a fluidic barrier seal that seals the interior environment from an environment exterior to the carrier.Type: ApplicationFiled: September 14, 2021Publication date: December 30, 2021Inventors: Daniel BABBS, Robert T. Caveney, Robert C. May, Krzysztof A. Majczak
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Patent number: 11201070Abstract: A substrate processing system including a processing section arranged to hold a processing atmosphere therein, a carrier having a shell forming an internal volume for holding at least one substrate for transport to the processing section, the shell being configured to allow the internal volume to be pumped down to a predetermined vacuum pressure that is different than an exterior atmosphere outside the substrate processing system, and a load port communicably connected to the processing section to isolate the processing atmosphere from the exterior atmosphere, the load port being configured to couple with the carrier to pump down the internal volume of the carrier and to communicably connect the carrier to the processing section, for loading the substrate into the processing section through the load port.Type: GrantFiled: May 22, 2018Date of Patent: December 14, 2021Assignee: Brooks Automation, Inc.Inventors: Daniel Babbs, William Fosnight, Robert C. May, William Weaver
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Patent number: 11121015Abstract: A substrate transport system includes a carrier having a housing forming an interior environment having an opening for holding at least one substrate and a door for sealing the opening from an outside atmosphere where when sealed the interior environment is configured to maintain an interior atmosphere therein, the housing including a fluid reservoir exterior to the interior environment and configured to contain a fluid, forming a different atmosphere in the fluid reservoir than the interior atmosphere, to form a fluidic barrier seal that seals the interior environment from an environment exterior to the carrier.Type: GrantFiled: August 27, 2019Date of Patent: September 14, 2021Assignee: Brooks Automation, Inc.Inventors: Daniel Babbs, Robert T. Caveney, Robert C. May, Krzysztof A. Majczak
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Patent number: 10679882Abstract: In accordance with an exemplary embodiment a semiconductor workpiece processing system having at least one processing tool for processing semiconductor workpieces, a container for holding at least one semiconductor workpiece therein for transport to and from the at least one processing tool and a first transport section elongated and defining a travel direction. The first transport section has parts, that interface the container, supporting and transporting the container along the travel direction to and from the at least one processing tool. The container is in substantially continuous transport at a substantially constant rate in the travel direction, when supported by the first transport section. A second transport section is connected to the at least one process tool for transporting the container to and from the at least one processing tool.Type: GrantFiled: December 21, 2015Date of Patent: June 9, 2020Assignee: BROOKS AUTOMATION, INCInventors: Michael L. Bufano, Ulysses Gilchrist, William Fosnight, Christopher Hofmeister, Daniel Babbs, Robert C. May
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Publication number: 20200161153Abstract: A substrate transport system includes a carrier having a housing forming an interior environment having an opening for holding at least one substrate and a door for sealing the opening from an outside atmosphere where when sealed the interior environment is configured to maintain an interior atmosphere therein, the housing including a fluid reservoir exterior to the interior environment and configured to contain a fluid, forming a different atmosphere in the fluid reservoir than the interior atmosphere, to form a fluidic barrier seal that seals the interior environment from an environment exterior to the carrier.Type: ApplicationFiled: August 27, 2019Publication date: May 21, 2020Inventors: Daniel Babbs, Robert T. Caveney, Robert C. May, Krysztof A. Majczak
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Patent number: 10395959Abstract: A substrate transport system includes a carrier having a housing forming an interior environment having an opening for holding at least one substrate and a door for sealing the opening from an outside atmosphere where when sealed the interior environment is configured to maintain an interior atmosphere therein, the housing including a fluid reservoir exterior to the interior environment and configured to contain a fluid, forming a different atmosphere in the fluid reservoir than the interior atmosphere, to form a fluidic barrier seal that seals the interior environment from an environment exterior to the carrier.Type: GrantFiled: January 22, 2014Date of Patent: August 27, 2019Assignee: Brooks Automation, Inc.Inventors: Daniel Babbs, Robert T. Caveney, Robert C. May, Krysztof A. Majczak
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Publication number: 20180269094Abstract: A substrate processing system including a processing section arranged to hold a processing atmosphere therein, a carrier having a shell forming an internal volume for holding at least one substrate for transport to the processing section, the shell being configured to allow the internal volume to be pumped down to a predetermined vacuum pressure that is different than an exterior atmosphere outside the substrate processing system, and a load port communicably connected to the processing section to isolate the processing atmosphere from the exterior atmosphere, the load port being configured to couple with the carrier to pump down the internal volume of the carrier and to communicably connect the carrier to the processing section, for loading the substrate into the processing section through the load port.Type: ApplicationFiled: May 22, 2018Publication date: September 20, 2018Inventors: Daniel Babbs, William Fosnight, Robert C. May, William Weaver
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Patent number: 9978623Abstract: A substrate processing system including a processing section arranged to hold a processing atmosphere therein, a carrier having a shell forming an internal volume for holding at least one substrate for transport to the processing section, the shell being configured to allow the internal volume to be pumped down to a predetermined vacuum pressure that is different than an exterior atmosphere outside the substrate processing system, and a load port communicably connected to the processing section to isolate the processing atmosphere from the exterior atmosphere, the load port being configured to couple with the carrier to pump down the internal volume of the carrier and to communicably connect the carrier to the processing section, for loading the substrate into the processing section through the load port.Type: GrantFiled: August 10, 2015Date of Patent: May 22, 2018Assignee: Brooks Automation, Inc.Inventors: Daniel Babbs, William Fosnight, Robert C. May, William Weaver
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Publication number: 20160111308Abstract: In accordance with an exemplary embodiment a semiconductor workpiece processing system having at least one processing tool for processing semiconductor workpieces, a container for holding at least one semiconductor workpiece therein for transport to and from the at least one processing tool and a first transport section elongated and defining a travel direction. The first transport section has parts, that interface the container, supporting and transporting the container along the travel direction to and from the at least one processing tool. The container is in substantially continuous transport at a substantially constant rate in the travel direction, when supported by the first transport section. A second transport section is connected to the at least one process tool for transporting the container to and from the at least one processing tool.Type: ApplicationFiled: December 21, 2015Publication date: April 21, 2016Inventors: Michael L. Bufano, Ulysses Gilchrist, William Fosnight, Christopher Hofmeister, Daniel Babbs, Robert C. May
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Publication number: 20160035608Abstract: A substrate processing system including a processing section arranged to hold a processing atmosphere therein, a carrier having a shell forming an internal volume for holding at least one substrate for transport to the processing section, the shell being configured to allow the internal volume to be pumped down to a predetermined vacuum pressure that is different than an exterior atmosphere outside the substrate processing system, and a load port communicably connected to the processing section to isolate the processing atmosphere from the exterior atmosphere, the load port being configured to couple with the carrier to pump down the internal volume of the carrier and to communicably connect the carrier to the processing section, for loading the substrate into the processing section through the load port.Type: ApplicationFiled: August 10, 2015Publication date: February 4, 2016Inventors: Daniel Babbs, William Fosnight, Robert C. May, William Weaver
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Patent number: 9224628Abstract: In accordance with an exemplary embodiment a semiconductor workpiece processing system having at least one processing tool for processing semiconductor workpieces, a container for holding at least one semiconductor workpiece therein for transport to and from the at least one processing tool and a first transport section elongated and defining a travel direction. The first transport section has parts, that interface the container, supporting and transporting the container along the travel direction to and from the at least one processing tool. The container is in substantially continuous transport at a substantially constant rate in the travel direction, when supported by the first transport section. A second transport section is connected to the at least one process tool for transporting the container to and from the at least one processing tool.Type: GrantFiled: September 24, 2012Date of Patent: December 29, 2015Assignee: Brooks Automation. Inc.Inventors: Michael L. Bufano, Ulysses Gilchrist, William Fosnight, Christopher Hofmeister, Daniel Babbs, Robert C. May
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Patent number: 9105673Abstract: A substrate processing system including a processing section arranged to hold a processing atmosphere therein, a carrier having a shell forming an internal volume for holding at least one substrate for transport to the processing section, the shell being configured to allow the internal volume to be pumped down to a predetermined vacuum pressure that is different than an exterior atmosphere outside the substrate processing system, and a load port communicably connected to the processing section to isolate the processing atmosphere from the exterior atmosphere, the load port being configured to couple with the carrier to pump down the internal volume of the carrier and to communicably connect the carrier to the processing section, for loading the substrate into the processing section through the load port.Type: GrantFiled: May 19, 2008Date of Patent: August 11, 2015Assignee: Brooks Automation, Inc.Inventors: Daniel Babbs, William Fosnight, Robert C. May, William Weaver