Patents by Inventor Robert C. Muller

Robert C. Muller has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithography line width monitor reflecting chip-wide average feature size
    Patent number: 7016054
    Abstract: The invention provides a method of measuring a standard critical dimension feature and insuring that this feature is representative of cross-chip average critical dimension size in accordance with an embodiment of the invention. The method includes the steps of incorporating a cluster of CD features, determining a cross-chip average feature size, selecting the CD feature which is closest in size to the cross-chip average CD feature size as the standard feature for in-line measurement, and implementing the CD measurement of the appropriate feature on production wafers.
    Type: Grant
    Filed: March 31, 2003
    Date of Patent: March 21, 2006
    Assignee: LSI Logic Corporation
    Inventors: Duane B. Barber, Robert C. Muller, Mark C. Simmons
  • Lithography line width monitor reflecting chip-wide average feature size
    Publication number: 20040190007
    Abstract: The invention provides a method of measuring a standard critical dimension feature and insuring that this feature is representative of cross-chip average critical dimension size in accordance with an embodiment of the invention. The method includes the steps of incorporating a cluster of CD features, determining a cross-chip average feature size, selecting the CD feature which is closest in size to the cross-chip average CD feature size as the standard feature for in-line measurement, and implementing the CD measurement of the appropriate feature on production wafers.
    Type: Application
    Filed: March 31, 2003
    Publication date: September 30, 2004
    Inventors: Duane B. Barber, Robert C. Muller, Mark C. Simmons