Patents by Inventor Robert Clark Roberts

Robert Clark Roberts has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • ATMOSPHERIC PLASMA IN WAFER PROCESSING SYSTEM OPTIMIZATION
    Publication number: 20200381262
    Abstract: A method and a system for polishing a wafer is disclosed. In one aspect, the method includes generating atmospheric plasma. The method further includes treating a component of a wafer processing system with the atmospheric plasma. The method further includes delivering a slurry containing abrasive and corrosive particles to a surface of the wafer processing system which includes atmospheric plasma-treated component. The method further includes polishing a wafer with the abrasive and corrosive particles.
    Type: Application
    Filed: March 22, 2018
    Publication date: December 3, 2020
    Inventors: Daniel Ray Trojan, Robert Clark Roberts