Abstract: In a lithographic projection system, a corrective optic in the form of one or more deformable plates is mounted within telecentric image or object space for making one-dimensional or two-dimensional adjustments to magnification. The deformable plate, which can be initially bent under the influence of a preload, contributes weak magnification power that influences the magnification of the projection system by changing the effective focal length in object or image space. An actuator adjusts the amount of curvature through which the deformable plate is bent for regulating the amount of magnification imparted by the deformable plate.

Abstract: An optical element mount has an inner member suspended within an outer member by a number of flexures. A first translational actuator is movable within the outer member and coupled to the inner member by a first shaft and is actuable to translate the inner member along a first substantially linear travel path within a translation plane that is orthogonal to an optical axis. A second translational actuator is movable within the outer member and coupled to the inner member by a second shaft and is actuable to translate the inner member along a second substantially linear travel path within the translation plane. A rotational actuator is movable within the outer member and coupled to the inner member by a third shaft and actuable to rotate the inner member about an instant point of rotation that is defined at the intersection of the first and second linear travel paths.

Abstract: An optical element mount has an inner member suspended within an outer member by a number of flexures. A first translational actuator is movable within the outer member and coupled to the inner member by a first shaft and is actuable to translate the inner member along a first substantially linear travel path within a translation plane that is orthogonal to an optical axis. A second translational actuator is movable within the outer member and coupled to the inner member by a second shaft and is actuable to translate the inner member along a second substantially linear travel path within the translation plane. A rotational actuator is movable within the outer member and coupled to the inner member by a third shaft and actuable to rotate the inner member about an instant point of rotation that is defined at the intersection of the first and second linear travel paths.

Abstract: In a lithographic projection system, a corrective optic in the form of one or more deformable plates is mounted within telecentric image or object space for making one-dimensional or two-dimensional adjustments to magnification. The deformable plate, which can be initially bent under the influence of a preload, contributes weak magnification power that influences the magnification of the projection system by changing the effective focal length in object or image space. An actuator adjusts the amount of curvature through which the deformable plate is bent for regulating the amount of magnification imparted by the deformable plate.