Abstract: Methods of the invention include fluorescence microscopy inspection of an imaged resist layer prior to any type of development processing. Preferred resists for use in the methods of the invention contain a component that facilitates monitoring of a resist coating layer, particularly a component that can function as a proton acceptor and have a change in fluorescence upon exposure to radiation reemployed to pattern an image in the resist coating layer.

Abstract: A method of imaging acid in a chemically amplified photoresist comprising the steps of: (a) exposing the chemically amplified photoresist to radiation thereby generating an acid, the chemically amplified photoresist comprising at least one species of pH-dependent fluorophore that fluoresces in the presence of the acid, the pH-dependent fluorophore being present at a concentration that enables the fluorescence from individual molecules of the pH-dependent fluorophore to be individually resolved; and (b) generating an image of the acid in the photoresist, the image comprising at least one or a plurality of discrete points corresponding to the fluorescent emission from an individual molecule or molecules of the pH-dependent fluorophore.

Abstract: Methods of the invention include fluorescence microscopy inspection of an imaged resist layer prior to any type of development processing. Preferred resists for use in the methods of the invention contain a component that facilitates monitoring of a resist coating layer, particularly a component that can function as a proton acceptor and have a change in fluorescence upon exposure to radiation reemployed to pattern an image in the resist coating layer.

Abstract: A method of imaging acid in a chemically amplified photoresist comprising the steps of: (a) exposing the chemically amplified photoresist to radiation thereby generating an acid, the chemically amplified photoresist comprising at least one species of pH-dependent fluorophore that fluoresces in the presence of the acid, the pH-dependent fluorophore being present at a concentration that enables the fluorescence from individual molecules of the pH-dependent fluorophore to be individually resolved; and (b) generating an image of the acid in the photoresist, the image comprising at least one or a plurality of discrete points corresponding to the fluorescent emission from an individual molecule or molecules of the pH-dependent fluorophore.

Abstract: A swing tempo training device is provided which may be used to teach proper swing tempo. The disclosed swing tempo training device comprises an accelerometer coupled to a voltage-to-frequency converter, and an output means coupled to the voltage-to-frequency converter. The accelerometer measures the real-time acceleration of a swinging object and produces a first voltage signal with a voltage level related to the measured real-time acceleration. The voltage-to-frequency converter then converters the first voltage signal into a second voltage signal with a frequency related to the first voltage level. The output means then outputs the second voltage signal. Preferably the output means comprises a frequency modulator and a FM transmitter.

Abstract: A method of imaging acids in chemically amplified photoresists involves exposing to radiation a chemically amplified photoresist comprising a pH-dependent fluorophore. Upon exposure to radiation, such as deep-UV radiation, the chemically amplified photoresist produces an acid, which is then visualized by the fluorescence of the pH-dependent fluorophore. An image is generated from the fluorescence of the pH-dependent fluorophore, thus providing a map of the location of the acid in the photoresist. The images are able to be visualized prior to a post-exposure bake of the resist composition. Chemically amplified photoresists comprising pH-dependent fluorophores are useful in the practice of the present invention. The method finds particular use in examining the efficiency of photoacid generators in chemically amplified photoresists, in that it allows the practitioner the ability to directly determine the amount of acid generated within the photoresist.

Abstract: A swing tempo training device is provided which may be used to teach proper swing tempo. The disclosed swing tempo training device comprises an accelerometer coupled to a voltage-to-frequency converter, and an output coupled to the voltage-to-frequency converter. The accelerometer measures the real-time acceleration of a swinging object and produces a first voltage signal with a voltage level related to the measured real-time acceleration. The voltage-to-frequency converter then converters the first voltage signal into a second voltage signal with a frequency related to the first voltage level. The output then outputs the second voltage signal. Preferably the output comprises a frequency modulator and a FM transmitter.

Abstract: A near field electromagnetic probe converts an incident energy beam into an interrogating beam which exhibits, in the near field vicinity of the probe, a transverse dimension that is small in relation to the wavelength of the incident energy beam. The probe comprises an energy source for providing the incident energy beam with a wavelength .lambda.. An antenna is positioned in the path of the incident energy beam and comprises at least a first conductive region and a second conductive region, both of which have output ends that are electrically separated by a gap whose lateral dimension is substantially less than .lambda.. The electromagnetic system which produces the incident energy should preferably have its numerical aperture matched to the far-field beam pattern of the antenna. Further, the incident beam should have a direction of polarization which matches the preferred polarization of the antenna.

Abstract: An apparatus for optically imaging surfaces at low temperature is disclosed. The apparatus places a probe within the near-field distance of a sample. Both the sample and probe are placed in a low-temperature environment. The probe and sample are movable relative to each other to enable the entire surface of the sample to be imaged. The probe dithers with a certain amplitude and is positioned within the near-field distance by observing the change in the dither amplitude as the probe is placed in proximity to the sample surface. The sample is imaged by spectroscopically evaluating the light emitted from the surface of the sample. The low temperature environment is provided by a cryostat which is adapted to receive the sample and probe. The cryostat enables the sample to be imaged at temperatures as low as 1.5 K., thereby reducing some of the light loss associated with spectroscopic imaging techniques.