Patents by Inventor Robert D. Sell

Robert D. Sell has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor processing silica soot abrasive slurry method for integrated circuit microelectronics
    Patent number: 7229927
    Abstract: The invention utilizes colloidal silica soot (62) in a semiconductor process for chemical-mechanical planarizing a semiconductor integrated circuit workpiece (24) with a slurry (60). The particulate abrasive agent colloidal solid sphere fused silica soot (62) provides a beneficial CMP slurry/process for semiconductor device manufacturing compared to standard semiconductor CMP slurries with conventional colloidal sol-gel or fumed silica.
    Type: Grant
    Filed: November 22, 2000
    Date of Patent: June 12, 2007
    Assignee: Corning Incorporated
    Inventors: Charles M. Darcangelo, Robert Sabia, Robert D. Sell, Harrie J. Stevens, Ljerka Ukrainczyk
  • Cleaning composition comprising solvating agent and rinsing agent
    Patent number: 6187729
    Abstract: A liquid cleaning composition comprising a solvating agent and a rinsing agent, the ratio of the vapor pressure of said rinsing agent to the vapor pressure of said solvating agent being at least about 20 and the use thereof to clean substrates that have soil adhered thereto.
    Type: Grant
    Filed: June 6, 1995
    Date of Patent: February 13, 2001
    Assignee: Petroferm Inc.
    Inventors: Michael E. Hayes, Donald P. Hosman, Kevin R. Hrebenar, Robert D. Sell
  • Cleaning with solvating and rinsing agents
    Patent number: 5716457
    Abstract: A process for removing soil from a substrate which includes the use of a liquid cleaning composition comprising a solvating agent (for example, a monobasic ester) and a rinsing agent (for example, a perfluorocarbon), the solvating agent having:(i) a room temperature vapor pressure of no greater than about 40 mm Hg; and(ii) a solvating strength of no less than about 10; and the rinsing agent having:(iii) a room temperature vapor pressure of about 8 mm Hg to about 760 mm Hg; and(iv) an ozone depleting factor of no greater than about 0.
    Type: Grant
    Filed: June 6, 1995
    Date of Patent: February 10, 1998
    Assignee: Petroferm Inc.
    Inventors: Michael E. Hayes, Donald P. Hosman, Kevin R. Hrebenar, Robert D. Sell
  • Cleaning process including use of solvating and rinsing agents
    Patent number: 5679175
    Abstract: A process for removing soil from a substrate which includes the use of liquid cleaning composition including a solvating agent (for example, a monobasic ester) and a rinsing agent (for example, a perfluorocarbon), the solvating agent having:(i) a room temperature vapor pressure of no greater than about 40 mm Hg; and(ii) a solvating strength of no less than about 10;and the rinsing agent having:(iii) a room temperature vapor pressure of about 8 mm Hg to about 760 mm Hg; and(iv) an ozone depleting factor of no greater than about 0.
    Type: Grant
    Filed: December 14, 1993
    Date of Patent: October 21, 1997
    Assignee: Petroferm Inc.
    Inventors: Michael E. Hayes, Donald P. Hosman, Kevin R. Hrebenar, Robert D. Sell