Abstract: An apparatus for cooling an electrodeless lamp including a supersonic outlet jet for providing a stream of cooling gas. A common manifold including mounting elements for a plurality of conduits of equal length for transporting cooling gas, wherein the mounting elements are at staggered elevational positions so that the conduits provide cooling gas in the vicinity of lamp envelope at different elevational positions.

Abstract: In a microwave powered electrodeless lamp, a single rotary motor is used to a) rotate the bulb and b) provide rotary motion to a blower or pump means for providing cooling fluid to the magnetron and/or to a forced gas cooling for providing cooler gas to the bulb. The blower may consist of only of an impeller without the usual blower housing. The motor, bulb stem and bulb, or motor, bulb stem, bulb and blower may be formed as an integral unit so as to facilitate replacement.

Abstract: A method and apparatus for stripping a photoresist layer from a semiconductor wafer, wherein oxidizing gas is fed from the edge of the wafer to the center. The oxidizing gas may be directed so that it is incident on the heated wafer support platform before it is incident on the wafer.

Abstract: An ozone generating cell which utilizes a quartz dielectric for providing high purity ozone. The quarts dielectric is cemented to one of the electrodes of the cell, and is then ground to a desired dimension.

Abstract: A lamp including a reflector and a light source for illuminating a target area in which the light rays on the target and have a small average local divergence. The reflector and light source are configured so that the predominant portion of the light rays which strike the target area do not cross the axis of the reflector. The reflector may be segmented and the light source is located so that various points on the target receive radiation which is reflected from a different number of segments with points near the periphery of the target area receiving radiation from a greater number of segments than those near the center of the target.

Abstract: An instrument for measuring radiation including a probe for collecting light. The probe includes a diffusive reflective surface at the forward end of the probe and an aperture block containing a pair of apertures to direct light reflected from the reflector to an optical waveguide and then to a light sensor and display unit.