Abstract: A support apparatus configured to support an object, the support apparatus includes a support body including an object holder to hold an object; an opening in the support body adjacent to an edge of the object holder; a channel in fluid communication with the opening via each of a plurality of passageways in the support body; and a passageway liner mounted in at least one of the plurality of passageways, the passageway liner being thermally insulating to substantially thermally decouple the support body from fluid in the at least one of the plurality of passageways.

Abstract: A support apparatus configured to support an object, the support apparatus includes a support body including an object holder to hold an object; an opening in the support body adjacent to an edge of the object holder; a channel in fluid communication with the opening via each of a plurality of passageways in the support body; and a passageway liner mounted in at least one of the plurality of passageways, the passageway liner being thermally insulating to substantially thermally decouple the support body from fluid in the at least one of the plurality of passageways.

Abstract: A method of selecting a periodic modulation to be applied to a variable of a radiation source, wherein the source delivers radiation for projection onto a substrate and wherein there is relative motion between the substrate and the radiation at a scan speed, the method including: for a set of system parameters and for a position on the substrate, calculating a quantity, the quantity being a measure of the contribution to an energy dose delivered to the position that arises from the modulation being applied to the variable of the source, wherein the contribution to the energy dose is calculated as a convolution of: a profile of radiation, and a contribution to an irradiance of radiation delivered by the source; and selecting a modulation frequency at which the quantity for the set of system parameters and the position on the substrate satisfies a certain criteria.

Abstract: A method of selecting a periodic modulation to be applied to a variable of a radiation source, wherein the source delivers radiation for projection onto a substrate and wherein there is relative motion between the substrate and the radiation at a scan speed, the method including: for a set of system parameters and for a position on the substrate, calculating a quantity, the quantity being a measure of the contribution to an energy dose delivered to the position that arises from the modulation being applied to the variable of the source, wherein the contribution to the energy dose is calculated as a convolution of: a profile of radiation, and a contribution to an irradiance of radiation delivered by the source; and selecting a modulation frequency at which the quantity for the set of system parameters and the position on the substrate satisfies a certain criteria.

Abstract: A support apparatus for a lithographic apparatus has an object holder and an extraction body radially outward of the object holder. The object holder is configured to support an object. The extraction body includes an extraction opening configured to extract fluid from a top surface of the support apparatus. The extraction body is spaced from the object holder such that the extraction body is substantially decoupled from the object holder. The extraction body comprises a projection configured such that it surrounds the object holder and such that, in use, a layer of liquid is retained on the projection and in contact with an object supported on the object holder.

Abstract: A heat exchange unit for use in a modular heat exchange system including at least one first heat exchanger having a closed circuit for cooling fluid at least one air cooler located upstream of the first heat exchanger, and at least one first fan arrangement operable to cause air to pass through the at least one air cooler and the at least one first heat exchanger, at least one channel providing cooling fluid interconnection between the first heat exchanger and, when in use in the modular heat exchange system, a heat exchanger in at least one other heat exchange unit.

Abstract: A moisture recirculation system for evaporatively cooling air, the system including a moisture distribution arrangement which, in use, distributes moisture to an upper portion of moisture absorbent material; a trough disposed below the lower most portion of the moisture absorbent material for initially collecting moisture run-off; a sump in fluid communication with the trough for collecting and storing said run-off; and a pump in fluid communication with the sump which, in use, transfers moisture from the sump to the moisture absorbent material.

Abstract: A hybrid method for processing papermaking fibers to remove high density stickies typically includes utilizing a multistage array of forward cleaners coupled with a flotation cell which increases overall efficiency of the system. In a preferred embodiment, a first rejects aqueous stream from a first stage bank of centrifugal cleaners is treated in a flotation cell before being fed to a second stage bank of centrifugal cleaners. With the improved technique, the accepts from the first stage bank of centrifugal cleaners may be combined with the accepts from the second stage bank of centrifugal cleaners and fed forward to a thickening device, for example. The technique is also suitably employed for removing stickies from material which has already been screened with a fine screen.

Abstract: A method of providing papermaking fibers with durable curl comprising: a) introducing papermaking fiber into a rotatable drum adapted for operation at elevated pressure; b) rotating the drum containing the papermaking fiber while maintaining: i) the fiber in aqueous dispersion having a consistency of from about 5 to about 45 percent; ii) a temperature of above about 100° C.; the drum being configured such that the aqueous fiber dispersion contacts the rotating wall of the drum during rotation thereof and the mechanical action of the drum on the dispersion provides a durable curl to the papermaking fiber; removing the curled fiber from the rotatable drum wherein the temperature, time, consistency and energy input to the fiber are controlled such that fibers treated exhibit a curl elevation of at least 50 percent at 1 hour storage time.

Abstract: A hybrid system for processing papermaking fibers includes a multistage array of forward cleaners coupled with a flotation cell which increases overall efficiency of the system. In a typical embodiment, a first rejects aqueous stream from a first stage bank of centrifugal cleaners is treated in a flotation cell before being fed to a second stage bank of centrifugal cleaners.

Abstract: A hybrid system for processing papermaking fibers includes a multistage array of forward cleaners coupled with a flotation cell which increases overall efficiency of the system. In a typical embodiment, a first rejects aqueous stream from a first stage bank of centrifugal cleaners is treated in a flotation cell before being fed to a second stage bank of centrifugal cleaners.