Patents by Inventor Robert E. Jilek

Robert E. Jilek has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20250258432
    Abstract: As described herein, photosensitive composition comprises RSnL3, where R is a hydrocarbyl ligand with 1-20 carbon atoms and one or more silicon and/or germanium heteroatoms and L is an acetylide ligand (—C?CA, where A is a silyl group with 0 to 6 carbon atoms or an organo group with 1 to 10 carbon atoms). Methods are described wherein photosensitive compositions are synthesized by reacting RX, where X is a halide, and MSnL3, where M is an alkali metal, alkali earth metal or a pseudo-alkali earth metal, L is an acetylide or a dialkylamide. The radiation sensitive compositions are effective for radiation based patterning, such as with EUV light.
    Type: Application
    Filed: April 9, 2025
    Publication date: August 14, 2025
    Inventors: Robert E. Jilek, Kai Jiang, Amrit K. Narasimhan
  • Publication number: 20250251662
    Abstract: An organometallic precursor solution comprising an organic solvent, a radiation sensitive organometallic precursor composition with hydrolysable metal ligands, and a radical scavenger additive is described. The radical scavenger additive or a blend of radical scavenger additives can provide for improvements to the stability of an organometallic precursor solution, such as improvements to storage stability, shelf-life, and/or batch-to-batch reproducibility through mitigation of the effects of reactive compounds in the environment, such as oxygen. A structure having a substrate, a radiation patternable organometallic coating composition, and a radical scavenging additive is also described. The radical scavenger additive or a blend thereof can result in patterning improvements, such as by improving coating quality and reducing patterning variability. Methods of using a radical scavenging additive in the formation of a structure comprising a radiation patternable organometallic film are described.
    Type: Application
    Filed: January 31, 2025
    Publication date: August 7, 2025
    Inventors: Fabian Felix Eberle, Amy M. Jystad, Brian J. Cardineau, Kai Jiang, Ken Maruyama, Seitarou Hattori, Kazuki Kasahara, Colin T. Carver, Robert E. Jilek, Peter De Schepper
  • Patent number: 12298666
    Abstract: As described herein, photosensitive composition comprises RSnL3, where R is a hydrocarbyl ligand with 1-20 carbon atoms and one or more silicon and/or germanium heteroatoms and L is an acetylide ligand (—C?CA, where A is a silyl group with 0 to 6 carbon atoms or an organo group with 1 to 10 carbon atoms). Methods are described wherein photosensitive compositions are synthesized by reacting RX, where X is a halide, and MSnL3, where M is an alkali metal, alkali earth metal or a pseudo-alkali earth metal, L is an acetylide or a dialkylamide. The radiation sensitive compositions are effective for radiation based patterning, such as with EUV light.
    Type: Grant
    Filed: May 3, 2024
    Date of Patent: May 13, 2025
    Assignee: Inpria Corporation
    Inventors: Robert E. Jilek, Kai Jiang, Amrit K. Narasimhan
  • Publication number: 20250085627
    Abstract: Organotin patterning compositions can incorporate Sn—F bonds to improve pattering performance. A precursor solution for a radiation patterning composition can comprise a blend of an organic solvent, an organotin composition represented by the formula RSnL3, and a compound capable of generating Sn—F bonds wherein R is a substituted or unsubstituted hydrocarbyl ligand with 1 to 31 carbon atoms and an Sn—C bond and L is a hydrolysable ligand. The fluoride source can be an ammonium fluoride. The patterning structure on a substrate surface has RSnFn moieties, generally within an oxo-hydroxo network.
    Type: Application
    Filed: September 11, 2024
    Publication date: March 13, 2025
    Inventors: Brian J. Cardineau, Robert E. Jilek, Kai Jiang, Alexander C. Marwitz
  • Publication number: 20250074930
    Abstract: Organotin patterning compositions have radiation sensitive ligands with acetal functional groups. Precursor compositions are compositions comprising (OR4)(OR3)R2CR1SnL3, where the R groups are substituted or unsubstituted hydrocarbyl groups and L is a hydrolysable ligand. The precursors can be formed into coating that can be patterned with radiation, in particular EUV radiation. Coatings formed with blended precursors with hydrocarbyl-based ligands with some having acetal groups and others lacking acetal groups can be particularly effective for improving positive tone patterning.
    Type: Application
    Filed: August 27, 2024
    Publication date: March 6, 2025
    Inventors: Alexander C. Marwitz, Kai Jiang, Bryan T. Novas, Robert E. Jilek, Christopher J. Reed, Brian J. Cardineau, Munendra Yadav
  • Publication number: 20240427239
    Abstract: Organotin compositions suitable for radiation based patterning have ligands providing fluorinated groups and unsaturated carbon-carbon bonds, such as C?C bonds. The fluorinated groups and unsaturated carbon-carbon bonds may or may not be located on the same ligand. Blends of precursors with different ligands provide added flexibility with respect to precursor design. Fluorinated organometallic compounds can be represented by the formula RUFSn(OR?)3, wherein RUF is an organo group with 1 to 31 carbon atoms with at least one C?C bond and at least one fluorine atom bonded to a carbon, with the organo group forming a C—Sn bond, wherein R? is an organo group with 1 to 10 carbon atoms. Precursors are suitable for solution based deposition or vapor based deposition.
    Type: Application
    Filed: June 3, 2024
    Publication date: December 26, 2024
    Inventors: Robert E. Jilek, Christopher J. Reed
  • Publication number: 20240337941
    Abstract: As described herein, photosensitive composition comprises RSnL3, where R is a hydrocarbyl ligand with 1-20 carbon atoms and one or more silicon and/or germanium heteroatoms and L is an acetylide ligand (—C?CA, where A is a silyl group with 0 to 6 carbon atoms or an organo group with 1 to 10 carbon atoms). Methods are described wherein photosensitive compositions are synthesized by reacting RX, where X is a halide, and MSnL3, where M is an alkali metal, alkali earth metal or a pseudo-alkali earth metal, L is an acetylide or a dialkylamide. The radiation sensitive compositions are effective for radiation based patterning, such as with EUV light.
    Type: Application
    Filed: May 3, 2024
    Publication date: October 10, 2024
    Inventors: Robert E. Jilek, Kai Jiang, Amrit K. Narasimhan
  • Patent number: 12032291
    Abstract: As described herein, photosensitive composition comprises RSnL3, where R is a hydrocarbyl ligand with 1-20 carbon atoms and one or more silicon and/or germanium heteroatoms and L is an acetylide ligand (—C?CA, where A is a silyl group with 0 to 6 carbon atoms or an organo group with 1 to 10 carbon atoms). Methods are described wherein photosensitive compositions are synthesized by reacting RX, where X is a halide, and MSnL3, where M is an alkali metal, alkali earth metal or a pseudo-alkali earth metal, L is an acetylide or a dialkylamide. The radiation sensitive compositions are effective for radiation based patterning, such as with EUV light.
    Type: Grant
    Filed: February 28, 2022
    Date of Patent: July 9, 2024
    Assignee: Inpria Corporation
    Inventors: Robert E. Jilek, Kai Jiang, Amrit K. Narasimhan
  • Publication number: 20240199658
    Abstract: Synthesis techniques are described for forming organotin trialkoxide compounds via direct alkylation of tin alkoxides. A first method involves reacting an alkali metal tin trialkoxide with an organohalide compound (RXn, where X is a halide atom and n?1) to form a monoorgano tin trialkoxide represented by the formula R[Sn(OR?)3]n. The method can be used to form polytin trialkoxide compounds with a plurality of radiation sensitive C—Sn bonds. R and R? include organo groups and can optionally comprise hetero-atoms and/or unsaturated bonds. A second method involves the ultraviolet light-driven reaction of a di-tin tetraalkoxide with an organohalide compound (RX) to form a monoorgano trialkoxide represented by the formula RSn(OR?)3. A third method involves the visible or ultraviolet light-driven reaction of a di-tin tetraalkoxide or an alkali metal tin trialkoxide with an fluorinated organohalide compound (RFX) to form a fluorinated monoorgano trialkoxide represented by the formula RFSn(OR?)3.
    Type: Application
    Filed: November 30, 2023
    Publication date: June 20, 2024
    Inventors: Robert E. Jilek, Christopher J. Reed, Bryan Novas
  • Publication number: 20230374338
    Abstract: Organotin compositions having the formula RSnL3 and corresponding synthetic methods are described. R includes aromatic, cyclic and/or halogenated ether moieties, or polyethers, and L includes hydrolysable groups. The organotin compositions may be formed as radiation-patternable coatings on substrates. The coatings may have an average thickness from about 1 nm to about 75 nm and have the formula RSnOn(OH)3-2n, forming an oxo-hydroxo network, where R is a hydrocarbyl ether group with 1 to 30 carbon atoms and 0<n<3/2, wherein regions of the coating are soluble in 2-heptanone in a puddle development step following a bake at 150° C. for 120 seconds. The coatings may be radiation-patternable using UV, EUV or ion beam radiation, and corresponding methods are described.
    Type: Application
    Filed: May 17, 2023
    Publication date: November 23, 2023
    Inventors: Robert E. Jilek, Brian J. Cardineau, Lucy Su Xiao Huffman, Stephen T. Meyers
  • Publication number: 20220411446
    Abstract: Organotin compounds are presented that are represented by the formula RSnL3, wherein R is a deuterated hydrocarbyl group and L is a hydrolysable ligand. Two different synthesis techniques are described for synthesizing these compositions. A first method involves reacting a primary halide hydrocarbyl compound (R—X, where X is a halide atom) with an organometallic composition comprising SnL3 moieties associated with metal cations M, where M is an alkali metal, alkaline earth metal, and/or pseudo-alkaline earth metal (Zn, Cd, or Hg), and L is either an amide ligand resulting in an alkali metal tin triamide compound or an acetylide ligand resulting in an alkali metal tin triacetylide, to form correspondingly a monohydrocarbyl tin triamide (RSn(NR?2)3) or a monohydrocarbyl tin triacetylide (RSn(C?CRs)3).
    Type: Application
    Filed: February 28, 2022
    Publication date: December 29, 2022
    Inventors: Robert E. Jilek, Brian J. Cardineau, Kierra Huihui-Gist, Stephen T. Meyers
  • Publication number: 20220397826
    Abstract: As described herein, photosensitive composition comprises RSnL3, where R is a hydrocarbyl ligand with 1-20 carbon atoms and one or more silicon and/or germanium heteroatoms and L is an acetylide ligand (—C?CA, where A is a silyl group with 0 to 6 carbon atoms or an organo group with 1 to 10 carbon atoms). Methods are described wherein photosensitive compositions are synthesized by reacting RX, where X is a halide, and MSnL3, where M is an alkali metal, alkali earth metal or a pseudo-alkali earth metal, L is an acetylide or a dialkylamide. The radiation sensitive compositions are effective for radiation based patterning, such as with EUV light.
    Type: Application
    Filed: February 28, 2022
    Publication date: December 15, 2022
    Inventors: Robert E. Jilek, Kai Jiang, Amrit K. Narasimhan
  • Publication number: 20220064192
    Abstract: Synthesis reactions are described to efficiently and specifically form compounds of the structure RSnL3, where R is an organic ligand to the tin, and L is hydrolysable ligand or a hydrolysis product thereof. The synthesis is effective for a broad range of R ligands. The synthesis is based on the use of alkali metal ions and optionally alkaline earth (pseudo-alkaline earth) metal ions. Compounds are formed of the structures represented by the formulas RSn(C?CSiR?3)3, R?R?ACSnL3, where A is a halogen atom (F, Cl, Br or I) or an aromatic ring with at least one halogen substituent, R?R?(R??O)CSnL3 or R?R?(N?C)CSnZ3.
    Type: Application
    Filed: August 24, 2021
    Publication date: March 3, 2022
    Inventors: Joseph B. Edson, Brian J. Cardineau, William Earley, Kierra Huihui-Gist, Thomas J. Lamkin, Robert E. Jilek
  • Patent number: 11063297
    Abstract: An electrolyte, an electrochemical cell including the electrolyte, and a battery including the electrochemical cell are disclosed. Exemplary electrolytes allow for electrochemical cells and batteries with relatively high efficiency and stability that can be charged to relatively high voltages.
    Type: Grant
    Filed: December 19, 2018
    Date of Patent: July 13, 2021
    Assignee: Viking Power Systems Pte, Ltd.
    Inventors: Jocelyn M. Newhouse, Robert Ellis Doe, Craig M. Downie, Robert E. Jilek, Matthew J. Trahan
  • Publication number: 20190198933
    Abstract: An electrolyte, an electrochemical cell including the electrolyte, and a battery including the electrochemical cell are disclosed. Exemplary electrolytes allow for electrochemical cells and batteries with relatively high efficiency and stability that can be charged to relatively high voltages.
    Type: Application
    Filed: December 19, 2018
    Publication date: June 27, 2019
    Applicant: Pellion Technologies Inc.
    Inventors: Jocelyn M. Newhouse, Robert Ellis Doe, Craig M. Downie, Robert E. Jilek, Matthew J. Trahan
  • Publication number: 20190198932
    Abstract: An electrolyte, an electrochemical cell including the electrolyte, and a battery including the electrochemical cell are disclosed. Exemplary electrolytes allow for electrochemical cells and batteries with relatively high efficiency and stability that can be charged to relatively high voltages.
    Type: Application
    Filed: December 19, 2018
    Publication date: June 27, 2019
    Applicant: Pellion Technologies Inc.
    Inventors: Jocelyn M. Newhouse, Robert Ellis Doe, Craig M. Downie, Robert E. Jilek, Matthew J. Trahan
  • Patent number: 9293790
    Abstract: A rechargable magnesium battery having an non-aqueous electrolyte is provided. The properties of the electrolyte include high conductivity, high Coulombic efficiency, and an electrochemical window that can exceed 3.5 V vs. Mg/Mg+2. The use of the electrolyte promotes the electrochemical deposition and dissolution of Mg without the use of any Grignard reagents, other organometallic materials, tetraphenyl borate, or tetrachloroaluminate derived anions. Other Mg-containing electrolyte systems that are expected to be suitable for use in secondary batteries are also described.
    Type: Grant
    Filed: March 14, 2013
    Date of Patent: March 22, 2016
    Assignee: PELLION TECHNOLOGIES, INC.
    Inventors: Robert Ellis Doe, George Hamilton Lane, Robert E. Jilek, Jaehee Hwang
  • Patent number: 8951676
    Abstract: An electrolyte for use in electrochemical cells is provided. The properties of the electrolyte include high conductivity, high Coulombic efficiency, and an electrochemical window that can exceed 3.5 V vs. Mg/Mg+2. The use of the electrolyte promotes the electrochemical deposition and dissolution of Mg without the use of any Grignard reagents, other organometallic materials, tetraphenyl borate, or tetrachloroaluminate derived anions. Other Mg-containing electrolyte systems that are expected to be suitable for use in secondary batteries are also described.
    Type: Grant
    Filed: March 14, 2013
    Date of Patent: February 10, 2015
    Assignee: Pellion Technologies, Inc.
    Inventors: Robert Ellis Doe, George Hamilton Lane, Robert E. Jilek, Jaehee Hwang
  • Publication number: 20140220450
    Abstract: An electrolyte for use in electrochemical cells is provided. One type of non-aqueous Magnesium electrolyte comprises: at least one organic solvent; at least one electrolytically active, soluble, inorganic Magnesium salt complex represented by the formula: MgnZX3+(2*n), in which Z is selected from a group consisting of aluminum, boron, phosphorus, titanium, iron, and antimony; X is a halogen and n=1-5. The properties of the electrolyte include high conductivity, high Coulombic efficiency, and an electrochemical window that can exceed 3.5 V vs. Mg/Mg+2 and total water content of <200 ppm. The use of this electrolyte promotes the electrochemical deposition and dissolution of Mg from the negative electrode without the use of any additive. Other Mg-containing electrolyte systems that are expected to be suitable for use in secondary batteries are also described. Rechargeable, high energy density Magnesium cells containing a cathode, an Mg metal anode, and an electrolyte are also disclosed.
    Type: Application
    Filed: December 30, 2013
    Publication date: August 7, 2014
    Applicant: PELLION TECHNOLOGIES, INC.
    Inventors: Robert E. Jilek, David Eaglesham, Robert Ellis Doe, Andrew Gmitter
  • Publication number: 20140099557
    Abstract: An electrolyte for use in electrochemical cells is provided. The properties of the electrolyte include high conductivity, high Coulombic efficiency, and an electrochemical window that can exceed 3.5 V vs. Mg/Mg+2. The use of the electrolyte promotes the electrochemical deposition and dissolution of Mg without the use of any Grignard reagents, other organometallic materials, tetraphenyl borate, or tetrachloroaluminate derived anions. Other Mg-containing electrolyte systems that are expected to be suitable for use in secondary batteries are also described.
    Type: Application
    Filed: March 14, 2013
    Publication date: April 10, 2014
    Applicant: PELLION TECHNOLOGIES, INC.
    Inventors: Robert Ellis Doe, George Hamilton Lane, Robert E. Jilek, Jaehee Hwang