Patents by Inventor Robert E. Rappaport

Robert E. Rappaport has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Gas control system for chemical vapor deposition system
    Patent number: 4369031
    Abstract: A gas flow control system in which several constituent gases are mixed and the mixture delivered through controlled injectors to a processing zone. Mass flow controllers control the injector flows with one of the controllers being a master and the other being slaved to provide a selected percentage of the flow through the master controller. The gas mix is regulated by a mass flow controller on one of the constituents and a flow meter on the other, the flow meter producing an error signal which is used to readjust the total flow through the injectors by control of the master injector flow controller.
    Type: Grant
    Filed: September 15, 1981
    Date of Patent: January 18, 1983
    Assignee: Thermco Products Corporation
    Inventors: Jon C. Goldman, Robert E. Rappaport